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Lower chamber liner

82
Assignee: APPLIED MATERIALS INCPriority: Nov 6, 2013Filed: Nov 6, 2013Granted: Nov 18, 2014
Est. expiryNov 6, 2033(~7.3 yrs left)· nominal 20-yr term from priority
Inventors:Shu-Kwan LauMehmet Tugrul Samir
82
PatentIndex Score
26
Cited by
27
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a lower chamber liner, as shown and described.

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