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Inventor
MAI JOHN D
US
2 patents
Patents
2 patents
US6905945B1
Jun 14, 2005
Microwave bonding of MEMS component
CALIFORNIA INST OF TECHN
21 citations
89
US6809305B2
Oct 26, 2004
Microwave bonding of thin film metal coated substrates
CALIFORNIA INST OF TECHN
1 citations
48