Inventor
CHANG HSIN
TW11 patents
⚠️ This page may combine multiple inventors who share the name “CHANG HSIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
5 patentsUS9123643B2Sep 1, 2015
Chip-on-wafer structures and methods for forming the same
TAIWAN SEMICONDUCTOR MFG4 citations73
US8962481B2Feb 24, 2015
Chip-on-wafer structures and methods for forming the same
TAIWAN SEMICONDUCTOR MFG3 citations62
US9099515B2Aug 4, 2015
Reconfigurable guide pin design for centering wafers having different sizes
TAIWAN SEMICONDUCTOR MFG0 citations52
US7800731B2Sep 21, 2010
Method and apparatus for removing particles in immersion lithography
TAIWAN SEMICONDUCTOR MFG0 citations52
US7728952B2Jun 1, 2010
Method and system for closing plate take-over in immersion lithography
TAIWAN SEMICONDUCTOR MFG0 citations51
TAIWAN SEMICONDUCTOR MFG CO LTD
3 patentsUS10692764B2Jun 23, 2020
Alignment marks in substrate having through-substrate via (TSV)
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10910267B2Feb 2, 2021
Alignment marks in substrate having through-substrate via (TSV)
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10163706B2Dec 25, 2018
Alignment marks in substrate having through-substrate via (TSV)
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62