Inventor · disambiguated record
Linda Fung-Ming Lee
Also filed as: LEE LINDA F · LEE LINDA FUNG-MING
2 granted patents·1 pending application·13 citations·filing 2005–2006
56Inventor score
Files withLAM RES CORP3
Top patents by PatentIndex Score
3 records- 0177US7413992B2Tungsten silicide etch process with reduced etch rate micro-loadingLAM RES CORP·Filed 2006·Granted Aug 19, 2008·10 cites·16 claims
- 0272US7682979B2Phase change alloy etchLAM RES CORP·Filed 2006·Granted Mar 23, 2010·3 cites·13 claims
- 0338US2007056925A1Selective etch of films with high dielectric constant with H2 additionLAM RES CORP·Filed 2005·Application pending·0 cites
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