Inventor
CHU HSUAN-CHIH
TW19 patents
Patents
19 patentsUS12030008B2Jul 9, 2024
Particle remover and method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations74
US10844477B2Nov 24, 2020
Electromagnetic module for physical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US12577653B2Mar 17, 2026
Deposition system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12360179B2Jul 15, 2025
System and method for measuring magnetic fields in PVD system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12341042B2Jun 24, 2025
Method for depositing target material in deposition chamber with tiltable workpiece holder
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12331392B2Jun 17, 2025
Deposition system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12233368B2Feb 25, 2025
Particle remover and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12176253B2Dec 24, 2024
Deposition system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12089506B2Sep 10, 2024
Target for MRAM
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11965237B2Apr 23, 2024
System and method for detecting abnormality of thin-film deposition process
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11851751B2Dec 26, 2023
Deposition system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11742231B2Aug 29, 2023
Movable wafer holder for film deposition chamber having six degrees of freedom
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11728226B2Aug 15, 2023
Deposition system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11688615B2Jun 27, 2023
System and method for heating semiconductor wafers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11396695B2Jul 26, 2022
Electromagnetic module for physical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12364173B2Jul 15, 2025
Resistive memory cell using an interfacial transition metal compound layer and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12104268B2Oct 1, 2024
Treatment system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11732379B2Aug 22, 2023
Treatment system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US12540396B2Feb 3, 2026
System and method for monitoring and performing thin film deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52