Inventor
YOSHIOKA HARUHIKO
JP15 patents
Patents
15 patentsUS5804983ASep 8, 1998
Probe apparatus with tilt correction mechanisms
TOKYO ELECTRON LTD212 citations99
US5642056AJun 24, 1997
Probe apparatus for correcting the probe card posture before testing
TOKYO ELECTRON LTD182 citations99
US6927587B2Aug 9, 2005
Probe apparatus
TOKYO ELECTRON LTD76 citations97
US6933736B2Aug 23, 2005
Prober
TOKYO ELECTRON LTD62 citations96
US6140828AOct 31, 2000
Prober and probe method
TOKYO ELECTRON LTD58 citations96
US4812201AMar 14, 1989
Method of ashing layers, and apparatus for ashing layers
TOKYO ELECTRON LTD481 citations96
US5640101AJun 17, 1997
Probe system and probe method
TOKYO ELECTRON LTD90 citations94
US7106082B2Sep 12, 2006
Stage driving apparatus and probe method
TOKYO ELECTRON LTD20 citations92
US6634245B1Oct 21, 2003
Drivingly rotatable mechanism of specimen loading table and specimen loading mechanism
TOKYO ELECTRON LTD19 citations92
US5912555AJun 15, 1999
Probe apparatus
TOKYO ELECTRON LTD17 citations91
US5585738ADec 17, 1996
Probe system having vertical height detection and double focal image pickup coinciding with probe contact in height adjustment
TOKYO ELECTRON LTD30 citations90
US6850052B2Feb 1, 2005
Probing method
TOKYO ELECTRON LTD10 citations74
US6262570B1Jul 17, 2001
Probe apparatus
TOKYO ELECTRON LTD6 citations72
US7221176B2May 22, 2007
Vacuum prober and vacuum probe method
TOKYO ELECTRON LTD4 citations61
USD383683SSep 16, 1997
Wafer prober
TOKYO ELECTRON LTD1 citations50