Inventor · disambiguated record
Nicolaas Antonius Allegondus Johannes Van Asten
Also filed as: VAN ASTEN NICOLAAS A A J · VAN ASTEN NICOLAAS ANTONIUS AL · VAN ASTEN NICOLAAS ANTONIUS ALLEGONDU · VAN ASTEN NICOLAAS ANTONIUS ALLEGONDU JOHANNES
8 granted patents·4 pending applications·262 citations·filing 1998–2014
88Inventor score
Top patents by PatentIndex Score
12 records- 0196US6674510B1Off-axis levelling in lithographic projection apparatusASML NETHERLANDS BV·Filed 2000·Granted Jan 6, 2004·192 cites·95 claims
- 0286US7411667B2Method for correcting disturbances in a level sensor light pathASML NETHERLANDS BV·Filed 2005·Granted Aug 12, 2008·11 cites·17 claims
- 0384US7019815B2Off-axis leveling in lithographic projection apparatusASML NETHERLANDS BV·Filed 2004·Granted Mar 28, 2006·19 cites·11 claims
- 0482US7542127B2Lithographic apparatus and method for manufacturing a deviceASML NETHERLANDS BV·Filed 2005·Granted Jun 2, 2009·7 cites·29 claims
- 0574US7751059B2Method for correcting disturbances in a level sensor light pathASML NETHERLANDS BV·Filed 2006·Granted Jul 6, 2010·8 cites·16 claims
- 0653US10588211B2Radiation source having debris controlASML NETHERLANDS BV·Filed 2014·Granted Mar 10, 2020·1 cites·20 claims
- 0752US7835017B2Lithographic apparatus, method of exposing a substrate, method of measurement, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Nov 16, 2010·3 cites·28 claims
- 0851US2008309915A1Method for correcting disturbances in a level sensor light pathASML NETHERLANDS BV·Filed 2008·Application pending·0 cites
- 0948US2012092636A1Metrology Apparatus, Lithography Apparatus and Method of Measuring a Property of a SubstrateVAN DER MAST KAREL DIEDERICK·Filed 2009·Application pending·0 cites
- 1038US2005134816A1Lithographic apparatus, method of exposing a substrate, method of measurement, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Application pending·0 cites
- 1136US2011273691A1Radiation source, method of controlling a radiation source, lithographic apparatus, and method for manufacturing a deviceASML NETHERLANDS BV·Filed 2011·Application pending·0 cites
- 1233US6327488B1Device for localizing an object in a turbid mediumPHILIPS CORP·Filed 1998·Granted Dec 4, 2001·21 cites·8 claims
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