Inventor · disambiguated record
Rik Teodoor Vangheluwe
Also filed as: VANGHELUWE RIK · VANGHELUWE RIK TEODOOR
2 granted patents·1 pending application·0 citations·filing 2007–2018
23Inventor score
Top patents by PatentIndex Score
3 records- 0141US11143969B2Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatusASML NETHERLANDS BV·Filed 2018·Granted Oct 12, 2021·0 cites·20 claims
- 0236US2010104959A1Lithographic method, apparatus and controllerASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 0334US8435593B2Method of inspecting a substrate and method of preparing a substrate for lithographyVANGHELUWE RIK TEODOOR·Filed 2007·Granted May 7, 2013·0 cites·20 claims
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