Inventor
TOKUMASU NOBORU
JP23 patents
⚠️ This page may combine multiple inventors who share the name “TOKUMASU NOBORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON SALES CO INC
14 patentsUS5915200AJun 22, 1999
Film forming method and semiconductor device manufacturing method
CANON SALES CO INC335 citations99
US6212789B1Apr 10, 2001
Semiconductor device manufacturing system
CANON SALES CO INC543 citations98
US5554570ASep 10, 1996
Method of forming insulating film
CANON SALES CO INC185 citations98
US5800877ASep 1, 1998
Method for forming a fluorine containing silicon oxide film
CANON SALES CO INC96 citations97
US5387546AFeb 7, 1995
Method for manufacturing a semiconductor device
CANON SALES CO INC100 citations96
US5834730ANov 10, 1998
Plasma processing equipment and gas discharging device
CANON SALES CO INC32 citations92
US6255230B1Jul 3, 2001
Method for modifying a film forming surface of a substrate on which a film is to be formed, and method for manufacturing a semiconductor device using the same
CANON SALES CO INC41 citations89
US6221755B1Apr 24, 2001
Film formation method and manufacturing method of semiconductor device
CANON SALES CO INC9 citations74
US6110814AAug 29, 2000
Film forming method and semiconductor device manufacturing method
CANON SALES CO INC13 citations74
US5952157ASep 14, 1999
Method for removal of resist film and method for production of semiconductor device
CANON SALES CO INC9 citations74
US5532193AJul 2, 1996
Method for forming insulating film
CANON SALES CO INC13 citations73
US6372650B2Apr 16, 2002
Method of cleaning substrate and method of manufacturing semiconductor device
CANON SALES CO INC4 citations63
US6432839B2Aug 13, 2002
Film forming method and manufacturing method of semiconductor device
CANON SALES CO INC2 citations62
US6472330B1Oct 29, 2002
Method for forming an interlayer insulating film, and semiconductor device
CANON SALES CO INC3 citations61
SEMICONDUCTOR PROCESS LAB CO
4 patentsUS5376591ADec 27, 1994
Method for manufacturing semiconductor device
SEMICONDUCTOR PROCESS LAB CO44 citations92
US5231058AJul 27, 1993
Process for forming cvd film and semiconductor device
SEMICONDUCTOR PROCESS LAB CO30 citations92
US5051380ASep 24, 1991
Process for producing semiconductor device
SEMICONDUCTOR PROCESS LAB CO45 citations92
US5569499AOct 29, 1996
Method for reforming insulating film
SEMICONDUCTOR PROCESS LAB CO11 citations73