Inventor
HIEDA KATSUHIKO
JP77 patents
Patents
50 patentsUS7579241B2Aug 25, 2009
Semiconductor device and method of manufacture thereof
TOSHIBA KK239 citations99
US7224019B2May 29, 2007
Semiconductor device and method of manufacture thereof
TOSHIBA KK269 citations99
US6737724B2May 18, 2004
Semiconductor device and method of manufacturing the same
TOSHIBA KK124 citations99
US6482714B1Nov 19, 2002
Semiconductor device and method of manufacturing the same
TOSHIBA KK171 citations99
US6251763B1Jun 26, 2001
Semiconductor device and method for manufacturing same
TOSHIBA KK114 citations99
US6054355AApr 25, 2000
Method of manufacturing a semiconductor device which includes forming a dummy gate
TOSHIBA KK338 citations99
US5072269ADec 10, 1991
Dynamic ram and method of manufacturing the same
TOSHIBA KK134 citations99
US4979014ADec 18, 1990
MOS transistor
TOSHIBA KK183 citations99
US6515338B1Feb 4, 2003
Semiconductor device and manufacturing method therefor
TOSHIBA KK82 citations98
US6236079B1May 22, 2001
Dynamic semiconductor memory device having a trench capacitor
TOSHIBA KK92 citations98
US6124189ASep 26, 2000
Metallization structure and method for a semiconductor device
TOSHIBA KK121 citations98
US6015990AJan 18, 2000
Semiconductor memory device and method of manufacturing the same
TOSHIBA KK109 citations98
US5371024ADec 6, 1994
Semiconductor device and process for manufacturing the same
TOSHIBA KK128 citations98
US6777776B2Aug 17, 2004
Semiconductor device that includes a plurality of capacitors having different capacities
TOSHIBA KK61 citations96
US6664592B2Dec 16, 2003
Semiconductor device with groove type channel structure
TOSHIBA KK60 citations96
US6351006B1Feb 26, 2002
Ferroelectric capacitor with means to prevent deterioration
TOSHIBA KK55 citations96
US6278164B1Aug 21, 2001
Semiconductor device with gate insulator formed of high dielectric film
TOSHIBA KK81 citations96
US6072221AJun 6, 2000
Semiconductor device having self-aligned contact plug and metallized gate electrode
TOSHIBA KK63 citations96
US5998821ADec 7, 1999
Dynamic ram structure having a trench capacitor
TOSHIBA KK75 citations96
US5747844AMay 5, 1998
Dynamic semiconductor memory device with higher density bit line/word line layout
TOSHIBA KK45 citations96
US5702567ADec 30, 1997
Plurality of photolithographic alignment marks with shape, size and spacing based on circuit pattern features
TOSHIBA KK56 citations96
US5508541AApr 16, 1996
Random access memory device with trench-type one-transistor memory cell structure
TOSHIBA KK61 citations96
US5235199AAug 10, 1993
Semiconductor memory with pad electrode and bit line under stacked capacitor
TOSHIBA KK48 citations96
US5138412AAug 11, 1992
Dynamic ram, having an improved large capacitance
TOSHIBA KK65 citations96
US7105397B2Sep 12, 2006
Semiconductor device and method of fabricating the same
TOSHIBA KK34 citations93
US6787827B2Sep 7, 2004
Semiconductor device and method for manufacturing the same
TOSHIBA KK30 citations93
US6707706B2Mar 16, 2004
Semiconductor memory device and method for manufacturing the same
TOSHIBA KK37 citations93
US6495054B1Dec 17, 2002
Etching method and cleaning method of chemical vapor growth apparatus
TOSHIBA KK22 citations93
US6388282B1May 14, 2002
Semiconductor memory device and method of manufacture the same
TOSHIBA KK22 citations93
US6335241B1Jan 1, 2002
Semiconductor device and manufacturing method thereof
TOSHIBA KK29 citations93
US6278152B1Aug 21, 2001
Semiconductor device and method of manufacturing the same
TOSHIBA KK20 citations93
US5914510AJun 22, 1999
Semiconductor memory device and method of manufacturing the same
TOSHIBA KK23 citations93
US5736760AApr 7, 1998
Random access memory device with trench-type one-transistor memory cell structure
TOSHIBA KK37 citations93
US5578847ANov 26, 1996
Dynamic semiconductor memory device with higher density bit line/word line layout
TOSHIBA KK23 citations93
US5561311AOct 1, 1996
Semiconductor memory with insulation film embedded in groove formed on substrate
TOSHIBA KK31 citations93
US5387532AFeb 7, 1995
Semiconductor memory having capacitor electrode formed above bit line
TOSHIBA KK35 citations93
US5350708ASep 27, 1994
Method of making dynamic random access semiconductor memory device
TOSHIBA KK23 citations93
US5155059AOct 13, 1992
Method of manufacturing dynamic RAM
TOSHIBA KK46 citations93
US5119155AJun 2, 1992
Semiconductor memory device with dielectric isolation
TOSHIBA KK25 citations93
US7071107B2Jul 4, 2006
Method for manufacturing a semiconductor device
TOSHIBA KK27 citations92
US7060559B2Jun 13, 2006
Method of manufacturing a nonvolatile semiconductor memory device
TOSHIBA KK35 citations92
US6992358B2Jan 31, 2006
Semiconductor device and method for manufacturing the same
TOSHIBA KK31 citations92
US6720606B1Apr 13, 2004
Dynamic semiconductor memory device having a trench capacitor
TOSHIBA KK39 citations92
US5363325ANov 8, 1994
Dynamic semiconductor memory device having high integration density
TOSHIBA KK46 citations92
US5106774AApr 21, 1992
Method of making trench type dynamic random access memory device
TOSHIBA KK22 citations92
US7416987B2Aug 26, 2008
Semiconductor device and method of fabricating the same
TOSHIBA KK9 citations84
US7413987B2Aug 19, 2008
Method for manufacturing a semiconductor device
TOSHIBA KK13 citations84
US7253075B2Aug 7, 2007
Semiconductor device and method for manufacturing the same
TOSHIBA KK14 citations84
US5250830AOct 5, 1993
Dynamic type semiconductor memory device and its manufacturing method
TOSHIBA KK20 citations82
US7180121B2Feb 20, 2007
Semiconductor device and method of manufacturing the same
TOSHIBA KK9 citations74
Showing the top 50 of 77 patents by PatentIndex Score.