Inventor · disambiguated record
Wolfram Grundke
Also filed as: GRUNDKE WOLFRAM
7 granted patents·23 citations·filing 1995–2017
79Inventor score
Top patents by PatentIndex Score
7 records- 0166US7887978B2Method of detecting repeating defects in lithography masks on the basis of test substrates exposed under varying conditionsGLOBALFOUNDRIES INC·Filed 2008·Granted Feb 15, 2011·2 cites·15 claims
- 0258US6649525B1Methods and systems for controlling resist residue defects at gate layer in a semiconductor device manufacturing processADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 18, 2003·7 cites·15 claims
- 0356US6605546B1Dual bake for BARC fill without voidsADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 12, 2003·7 cites·49 claims
- 0441US6759179B1Methods and systems for controlling resist residue defects at gate layer in a semiconductor device manufacturing processADVANCED MICRO DEVICES INC·Filed 2002·Granted Jul 6, 2004·2 cites·14 claims
- 0536US9798244B2Methods, apparatus, and systems for minimizing defectivity in top-coat-free lithography and improving reticle CD uniformityGLOBALFOUNDRIES INC·Filed 2015·Granted Oct 24, 2017·0 cites·20 claims
- 0635US10146132B2Mobile dispense device for chemicals used in micro-processingGLOBALFOUNDRIES INC·Filed 2017·Granted Dec 4, 2018·0 cites·17 claims
- 0723US5993664AMethod for producing a material for heavy metal absorption or for analytically detecting heavy metalsSTREIL THOMAS·Filed 1995·Granted Nov 30, 1999·5 cites·15 claims
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