Inventor
KOMATSUDA HIDEKI
JP48 patents
⚠️ This page may combine multiple inventors who share the name “KOMATSUDA HIDEKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
40 patentsUS6452661B1Sep 17, 2002
Illumination system and exposure apparatus and method
NIKON CORP167 citations99
US6590959B2Jul 8, 2003
High-intensity sources of short-wavelength electromagnetic radiation for microlithography and other uses
NIKON CORP85 citations97
US6563567B1May 13, 2003
Method and apparatus for illuminating a surface using a projection imaging apparatus
NIKON CORP143 citations97
US6781671B2Aug 24, 2004
Imaging optical system and exposure apparatus
NIKON CORP55 citations96
US6727980B2Apr 27, 2004
Apparatus and method for pattern exposure and method for adjusting the apparatus
NIKON CORP55 citations96
US6661499B2Dec 9, 2003
Projection exposure apparatus with a catadioptric projection optical system
NIKON CORP64 citations96
US6466303B1Oct 15, 2002
Projection exposure apparatus with a catadioptric projection optical system
NIKON CORP76 citations96
US6266389B1Jul 24, 2001
Method for manufacturing a device, an exposure apparatus, and a method for manufacturing an exposure apparatus
NIKON CORP105 citations96
US6049374AApr 11, 2000
Illumination apparatus, a projection exposure apparatus having the same, a method of manufacturing a device using the same, and a method of manufacturing the projection exposure apparatus
NIKON CORP61 citations96
US5594526AJan 14, 1997
Optical integrator and projection exposure apparatus using the same
NIKON CORP93 citations96
US6842500B1Jan 11, 2005
Exposure apparatus and exposure method using same
NIKON CORP30 citations93
US7800734B2Sep 21, 2010
Lighting apparatus, exposure apparatus and microdevice manufacturing method
NIKON CORP27 citations92
US6833904B1Dec 21, 2004
Exposure apparatus and method of fabricating a micro-device using the exposure apparatus
NIKON CORP46 citations92
US6249382B1Jun 19, 2001
Illumination optical system and projection exposure apparatus using same
NIKON CORP31 citations92
US5615047AMar 25, 1997
Illumination apparatus and exposure apparatus using it
NIKON CORP28 citations92
US7023953B2Apr 4, 2006
Illumination system and exposure apparatus and method
NIKON CORP12 citations84
US6526118B2Feb 25, 2003
Projection exposure apparatus and method, and illumination optical system thereof
NIKON CORP17 citations84
US7483122B2Jan 27, 2009
Projection optical system, exposure apparatus, and exposure method
NIKON CORP7 citations74
US7312851B2Dec 25, 2007
Projection optical system, exposure apparatus, and exposure method in which a reflective projection optical system has a non-circular aperture stop
NIKON CORP7 citations74
US6665051B2Dec 16, 2003
Illumination system and exposure apparatus and method
NIKON CORP12 citations74
US5790239AAug 4, 1998
Illumination optical apparatus containing an optical integrator and projection exposure apparatus using the same
NIKON CORP12 citations74
US5713660AFeb 3, 1998
Illumination optical apparatus
NIKON CORP15 citations74
US5594587AJan 14, 1997
Illumination device with allowable error amount of telecentricity on the surface of the object to be illuminated and exposure apparatus using the same
NIKON CORP15 citations74
US10228623B2Mar 12, 2019
Image-forming optical system, exposure apparatus, and device producing method
NIKON CORP2 citations73
US11934104B2Mar 19, 2024
Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus
NIKON CORP1 citations72
US10831106B2Nov 10, 2020
Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus
NIKON CORP2 citations72
US8023103B2Sep 20, 2011
Exposure apparatus, exposure method, and method for producing device
NIKON CORP3 citations63
US7446856B2Nov 4, 2008
Illumination systems, exposure apparatus, and microdevice-manufacturing methods using same
NIKON CORP6 citations63
US7023523B2Apr 4, 2006
Exposure system and exposure method
NIKON CORP5 citations63
US6819403B2Nov 16, 2004
Illumination optical system, exposure apparatus, and microdevice manufacturing method
NIKON CORP4 citations63
US12105428B2Oct 1, 2024
Image-forming optical system, exposure apparatus, and device producing method
NIKON CORP0 citations62
US11467501B2Oct 11, 2022
Image-forming optical system, exposure apparatus, and device producing method
NIKON CORP0 citations62
US11353795B2Jun 7, 2022
Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus
NIKON CORP0 citations62
US10866522B2Dec 15, 2020
Image-forming optical system, exposure apparatus, and device producing method
NIKON CORP0 citations52
US10459343B2Oct 29, 2019
Illumination device
NIKON CORP0 citations52
US10162269B2Dec 25, 2018
Illumination device
NIKON CORP0 citations52
US9939733B2Apr 10, 2018
Image-forming optical system, exposure apparatus, and device producing method
NIKON CORP0 citations52
US7471456B2Dec 30, 2008
Optical integrator, illumination optical device, exposure device, and exposure method
NIKON CORP1 citations52
US6768537B2Jul 27, 2004
Projection optical system, exposure apparatus, and exposure method
NIKON CORP0 citations52
US10345708B2Jul 9, 2019
Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus
NIKON CORP0 citations51
KOMATSUDA HIDEKI
6 patentsUS9557548B2Jan 31, 2017
Image-forming optical system, exposure apparatus, and device producing method
KOMATSUDA HIDEKI9 citations83
US9703204B2Jul 11, 2017
Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus
KOMATSUDA HIDEKI2 citations71
US9760012B2Sep 12, 2017
Illumination device
KOMATSUDA HIDEKI0 citations51
US8780328B2Jul 15, 2014
Illumination optical apparatus, exposure apparatus, and device manufacturing method
KOMATSUDA HIDEKI0 citations51
US8467032B2Jun 18, 2013
Exposure apparatus and electronic device manufacturing method
KOMATSUDA HIDEKI0 citations51
US8081296B2Dec 20, 2011
Illumination optical apparatus, exposure apparatus, and device manufacturing method
KOMATSUDA HIDEKI0 citations41