Inventor
SIM WOOJOO
KR2 patents
Patents
2 patentsUS11747721B2Sep 5, 2023
Method of forming shape on mask based on deep learning, and mask manufacturing method using the method of forming the shape on mask
SAMSUNG ELECTRONICS CO LTD0 citations49
US12118708B2Oct 15, 2024
Device and method for detecting defects on wafer
SAMSUNG ELECTRONICS CO LTD0 citations47