Inventor
FUJIMOTO TOMOAKI
JP6 patents
Patents
6 patentsUS12205831B2Jan 21, 2025
Cleaning apparatus and polishing apparatus
EBARA CORP0 citations61
US11948811B2Apr 2, 2024
Cleaning apparatus and polishing apparatus
EBARA CORP0 citations61
US11894244B2Feb 6, 2024
Cleaning member mounting mechanism and substrate cleaning apparatus
EBARA CORP0 citations60
USD992845SJul 18, 2023
Roller shaft for substrate cleaning
EBARA CORP0 citations60
US12100587B2Sep 24, 2024
Substrate cleaning apparatus and cleaning method of substrate
EBARA CORP0 citations50
US11524322B2Dec 13, 2022
Jig for attaching and detaching cleaning member
EBARA CORP0 citations47