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Roller shaft for substrate cleaning

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Assignee: EBARA CORPPriority: May 15, 2020Filed: Nov 13, 2020Granted: Jul 18, 2023
Est. expiryMay 15, 2040(~13.8 yrs left)· nominal 20-yr term from priority
Inventors:Tomoaki FujimotoMitsuru MiyazakiTakuya Inoue
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Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a roller shaft for substrate cleaning, as shown and described.

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