Inventor

HARA SHINICHI

JP93 patents

⚠️ This page may combine multiple inventors who share the name “HARA SHINICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HARA SHINICHI

CANON KK

Vacuum chuck

Wafer holding device in an exposure apparatus

X-ray mask, and exposure method and apparatus using the same

X-ray projection exposure apparatus and a device manufacturing method

Mask supporting device and correction method therefor, and exposure apparatus and device producing method utilizing the same

Wafer cooling device

Exposure apparatus with a substrate holding mechanism

Liquid cooled x-ray lithographic exposure apparatus

Wafer supporting apparatus

Mask holding device, and an exposure apparatus and a device manufacturing method using the device

Device manufacturing method with transfer magnification adjustment to correct thermal distortion of substrate

Mask manufacturing method and apparatus and device manufacturing method using a mask manufactured by the method or apparatus

Mask holding method, mask and mask chuck, exposure apparatus using the mask and the mask chuck, and device production method using the exposure apparatus

X-ray lithography apparatus including a dose detectable mask

Exposure apparatus for controlling intensity of exposure radiation

Workpiece supporting mechanism

Processing apparatus, measuring apparatus, and device manufacturing method

X-ray mask, and exposure method and apparatus using the same

Processing apparatus with pressure control and gas recirculation system

Mask structure and mask holding mechanism for exposure apparatus

Substrate holding device and exposing apparatus using the same

Substrate holding device and exposing apparatus using the same

X-ray mask, and exposure apparatus and device production using the mask

Cooling system, exposure apparatus having the same, and device manufacturing method

Processing apparatus for processing sample in predetermined atmosphere

Exposure apparatus, gas replacement method, semiconductor device manufacturing method, semiconductor manufacturing factory and exposure apparatus maintenance method

Cooling apparatus and method, and exposure apparatus having the cooling apparatus

Illumination apparatus, projection exposure apparatus, and device fabrication method

Reflection type mask

Holding mechanism in exposure apparatus, and device manufacturing method

Mask pattern magnification correction method, magnification correction apparatus, and mask structure

X-ray projection exposure apparatus and a device manufacturing method

X-ray projection exposure apparatus and a device manufacturing method

Holding mechanism, and exposure apparatus using the mechanism

Mask and mask supporting mechanism

HITACHI LTD

Method of manufacturing a thin-film magnetic head

Thin film of Ni-Co-Fe ternary alloy and process for producing the same

SHIBUYA KOGYO CO LTD

Cleaning nozzle and cleaning apparatus

Injection apparatus for gas-liquid mixed flow

NEC CORP

Semiconductor memory production system and semiconductor memory production method

Semiconductor device manufacturing system and method of manufacturing semiconductor devices

FUJITSU LTD

Intermediate communication controller that sends transmission data in a predetermined order to a corresponding slave unit upon request from a master controller

COMPUTER BASIC TECH RES

Method of patterning thin film

NEC ELECTRONICS CORP

Method of manufacturing semiconductor devices

MITSUBISHI PAPER MILLS LTD

Method of oxidizing sulfide-containing liquor

TOSOH CORP

Disordered fluorite-type photochemical hole burning crystal containing SM2+ as active ions

KOMATSU MFG CO LTD

Air cleaning apparatus for vehicles

COMPUTER BASIC TECHNOLOGY ASS

Production method of thin film magnetic head

MITUTOYO CORP

Laser tracking interferometer

NAGANO HIDEKI

Fragrance device for vehicle and sealing component used therein