Inventor
SHICHIDA HIROYUKI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “SHICHIDA HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
17 patentsUS6048434AApr 11, 2000
Substrate holding system including an electrostatic chuck
HITACHI LTD68 citations96
US5906684AMay 25, 1999
Method of holding substrate and substrate holding system
HITACHI LTD54 citations96
US5792304AAug 11, 1998
Method of holding substrate and substrate holding system
HITACHI LTD62 citations96
US5458687AOct 17, 1995
Method of and apparatus for securing and cooling/heating a wafer
HITACHI LTD67 citations96
US6645871B2Nov 11, 2003
Method of holding substrate and substrate holding system
HITACHI LTD20 citations92
US6524428B2Feb 25, 2003
Method of holding substrate and substrate holding system
HITACHI LTD24 citations92
US6336991B1Jan 8, 2002
Method of holding substrate and substrate holding system
HITACHI LTD19 citations92
US6221201B1Apr 24, 2001
Method of holding substrate and substrate holding system
HITACHI LTD18 citations92
US5985035ANov 16, 1999
Method of holding substrate and substrate holding system
HITACHI LTD17 citations92
US5961774AOct 5, 1999
Method of holding substrate and substrate holding system
HITACHI LTD22 citations92
US5580420ADec 3, 1996
Plasma generating method and apparatus and plasma processing method and apparatus
HITACHI LTD39 citations92
US6217705B1Apr 17, 2001
Method of holding substrate and substrate holding system
HITACHI LTD26 citations91
US6899789B2May 31, 2005
Method of holding substrate and substrate holding system
HITACHI LTD11 citations82
US6676805B2Jan 13, 2004
Method of holding substrate and substrate holding system
HITACHI LTD10 citations82
US6610170B2Aug 26, 2003
Method of holding substrate and substrate holding system
HITACHI LTD8 citations74
US6610171B2Aug 26, 2003
Method of holding substrate and substrate holding system
HITACHI LTD6 citations74
US6544379B2Apr 8, 2003
Method of holding substrate and substrate holding system
HITACHI LTD9 citations74