Inventor · disambiguated record

Xusheng Yu

Also filed as: YU XUSHENG

1 granted patent·7 citations·filing 2017–2017

29Inventor score

Technology areasH10W

Files withGLOBALFOUNDRIES INC1

Top patents by PatentIndex Score

1 record

0187US10249496B2Narrowed feature formation during a double patterning processGLOBALFOUNDRIES INC·Filed 2017·Granted Apr 2, 2019·7 cites·11 claims

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