Inventor
SUGISHITA MASASHI
JP28 patents
⚠️ This page may combine multiple inventors who share the name “SUGISHITA MASASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
10 patentsUS7577493B2Aug 18, 2009
Temperature regulating method, thermal processing system and semiconductor device manufacturing method
HITACHI INT ELECTRIC INC14 citations84
US7346273B2Mar 18, 2008
Substrate processing equipment
HITACHI INT ELECTRIC INC9 citations84
US9695511B2Jul 4, 2017
Substrate processing apparatus, method of manufacturing semiconductor device and method of processing substrate
HITACHI INT ELECTRIC INC3 citations73
USD803075SNov 21, 2017
Thermometry tool for substrate processing apparatus
HITACHI INT ELECTRIC INC2 citations72
USD819463SJun 5, 2018
Protector tube for thermocouple
HITACHI INT ELECTRIC INC2 citations71
USD818850SMay 29, 2018
Protector tube for thermocouple
HITACHI INT ELECTRIC INC4 citations71
US7727780B2Jun 1, 2010
Substrate processing method and semiconductor manufacturing apparatus
HITACHI INT ELECTRIC INC6 citations63
US8367975B2Feb 5, 2013
Temperature adjustment method
HITACHI INT ELECTRIC INC2 citations62
US7930059B2Apr 19, 2011
Temperature regulating method, thermal processing system and semiconductor device manufacturing method
HITACHI INT ELECTRIC INC4 citations62
US7700054B2Apr 20, 2010
Substrate processing apparatus having gas side flow via gas inlet
HITACHI INT ELECTRIC INC5 citations62
KOKUSAI ELECTRIC CORP
7 patentsUS12503770B2Dec 23, 2025
Substrate processing apparatus and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations62
US11761087B2Sep 19, 2023
Substrate processing apparatus and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations62
US11158529B2Oct 26, 2021
Method of manufacturing semiconductor device, method of controlling temperature and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP1 citations62
US12293930B2May 6, 2025
Substrate processing apparatus, method of manufacturing semiconductor device and heater
KOKUSAI ELECTRIC CORP0 citations52
US12085338B2Sep 10, 2024
Heater, temperature control system, and processing apparatus
KOKUSAI ELECTRIC CORP0 citations51
US12461507B2Nov 4, 2025
Substrate processing apparatus, substrate processing method, semiconductor device manufacturing method, and control program
KOKUSAI ELECTRIC CORP0 citations48
US12566423B2Mar 3, 2026
Temperature control method, method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus
KOKUSAI ELECTRIC CORP0 citations47
HONDA MOTOR CO LTD
6 patentsUS10381661B2Aug 13, 2019
Resin frame equipped membrane electrode assembly for fuel cell
HONDA MOTOR CO LTD4 citations72
US10141592B2Nov 27, 2018
Resin-framed membrane electrode assembly for fuel cell
HONDA MOTOR CO LTD2 citations72
US9577276B2Feb 21, 2017
Fuel cell membrane electrode assembly
HONDA MOTOR CO LTD2 citations72
US10658683B2May 19, 2020
Method for producing electrolyte membrane electrode assembly for fuel cells
HONDA MOTOR CO LTD2 citations71
US9331346B2May 3, 2016
Fuel cell resin frame equipped membrane electrode assembly
HONDA MOTOR CO LTD2 citations62
US11316178B2Apr 26, 2022
Checking method of resin-framed membrane electrode assembly
HONDA MOTOR CO LTD0 citations51
HAYASHIDA AKIRA
2 patentsUS8116618B2Feb 14, 2012
Heating apparatus, substrate processing apparatus, and method of manufacturing semiconductor devices
HAYASHIDA AKIRA2 citations59
US9184069B2Nov 10, 2015
Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and insulator
HAYASHIDA AKIRA1 citations48