Inventor
KAWABE YOSHIO
JP18 patents
⚠️ This page may combine multiple inventors who share the name “KAWABE YOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
14 patentsUS9541842B2Jan 10, 2017
Reflective image-forming optical system, exposure apparatus, and device manufacturing method
NIKON CORP4 citations82
US11934104B2Mar 19, 2024
Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus
NIKON CORP1 citations72
US10831106B2Nov 10, 2020
Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus
NIKON CORP2 citations72
US10025195B2Jul 17, 2018
Reflective image-forming optical system, exposure apparatus, and device manufacturing method
NIKON CORP3 citations71
US11353795B2Jun 7, 2022
Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus
NIKON CORP0 citations62
US10976669B2Apr 13, 2021
Reflective image-forming optical system, exposure apparatus, and device manufacturing method
NIKON CORP0 citations61
US12121991B2Oct 22, 2024
Processing apparatus, and manufacturing method of movable body
NIKON CORP0 citations59
US10599042B2Mar 24, 2020
Reflective image-forming optical system, exposure apparatus, and device manufacturing method
NIKON CORP0 citations51
US10345708B2Jul 9, 2019
Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus
NIKON CORP0 citations51
US10191387B2Jan 29, 2019
Reflective mirror, projection optical system, exposure apparatus, and device manufacturing method
NIKON CORP0 citations51
US9606447B2Mar 28, 2017
Reflective mirror, projection optical system, exposure apparatus, and device manufacturing method
NIKON CORP0 citations51
US12157184B2Dec 3, 2024
Processing apparatus, and manufacturing method of movable body
NIKON CORP0 citations50
US12383981B2Aug 12, 2025
Processing apparatus, and manufacturing method of movable body
NIKON CORP0 citations49
US12544854B2Feb 10, 2026
Processing apparatus, processing system, and manufacturing method of movable body
NIKON CORP0 citations45