P

Inventor

LIN CHANG-SHENG

TW50 patents
⚠️ This page may combine multiple inventors who share the name “LIN CHANG-SHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

25 patents
US9604340B2Mar 28, 2017

Carrier head having abrasive structure on retainer ring

TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US9415479B2Aug 16, 2016

Conductive chemical mechanical planarization polishing pad

TAIWAN SEMICONDUCTOR MFG CO LTD10 citations84
US9236446B2Jan 12, 2016

Barc-assisted process for planar recessing or removing of variable-height layers

TAIWAN SEMICONDUCTOR MFG CO LTD10 citations84
US10504753B2Dec 10, 2019

Brush cleaning apparatus, chemical-mechanical polishing (CMP) system and wafer processing method

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US9597771B2Mar 21, 2017

Carrier head having retainer ring, polishing system including the carrier head and method of using the polishing system

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10109523B2Oct 23, 2018

Method of cleaning wafer after CMP

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12011803B2Jun 18, 2024

Carrier head having abrasive structure on retainer ring

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11694909B2Jul 4, 2023

Brush cleaning apparatus, chemical-mechanical polishing (CMP) system and wafer processing method

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11458587B2Oct 4, 2022

Carrier head having retainer ring, polishing system including the carrier head and method of using the polishing system

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11312882B2Apr 26, 2022

CMP slurry solution for hardened fluid material

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11011385B2May 18, 2021

CMP-friendly coatings for planar recessing or removing of variable-height layers

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10770345B2Sep 8, 2020

Integrated circuit and fabrication method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US9852899B2Dec 26, 2017

Wafer back-side polishing system and method for integrated circuit device manufacturing processes

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US9748109B2Aug 29, 2017

CMP-friendly coatings for planar recessing or removing of variable-height layers

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US9559021B2Jan 31, 2017

Wafer back-side polishing system and method for integrated circuit device manufacturing processes

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US9287127B2Mar 15, 2016

Wafer back-side polishing system and method for integrated circuit device manufacturing processes

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations62
US10916473B2Feb 9, 2021

Method of cleaning wafer after CMP

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10734254B2Aug 4, 2020

Brush cleaning apparatus, chemical-mechanical polishing (CMP) system and wafer processing method

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10377013B2Aug 13, 2019

Carrier head having retainer ring, polishing system including the carrier head and method of using the polishing system

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10300578B2May 28, 2019

Carrier head having abrasive structure on retainer ring

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9478431B2Oct 25, 2016

BARC-assisted process for planar recessing or removing of variable-height layers

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9466501B2Oct 11, 2016

Method and apparatus for improving CMP planarity

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations52
US10774241B2Sep 15, 2020

CMP slurry solution for hardened fluid material

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10510594B2Dec 17, 2019

Method of cleaning wafer after CMP

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10312128B2Jun 4, 2019

Chemical-mechanical polish (CMP) devices, tools, and methods

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations42

BASSO IND CORP

7 patents

VANGUARD INT SEMICONDUCT CORP

6 patents

QUANTA COMP INC

3 patents

HO JUNG-MAO

2 patents

TAIWAN SEMICONDUCTOR MFG

1 patent

WU JIAN-RUNG

1 patent

KUAN HSIN-NING

1 patent

PRIME WORLD INT HOLDINGS LTD

1 patent

APPLIED OPTOELECTRONICS INC

1 patent

LIN KUO-YIN

1 patent

LATTICE ENERGY TECH CORPORATION

1 patent