Inventor
FONDURULIA KYLE
US28 patents
⚠️ This page may combine multiple inventors who share the name “FONDURULIA KYLE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
19 patentsUS11377732B2Jul 5, 2022
Reactant vaporizer and related systems and methods
ASM IP HOLDING BV6 citations86
US10876205B2Dec 29, 2020
Reactant vaporizer and related systems and methods
ASM IP HOLDING BV11 citations86
US10714315B2Jul 14, 2020
Semiconductor reaction chamber showerhead
ASM IP HOLDING BV12 citations86
US10872803B2Dec 22, 2020
Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination
ASM IP HOLDING BV6 citations83
US10872804B2Dec 22, 2020
Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination
ASM IP HOLDING BV7 citations83
US10683571B2Jun 16, 2020
Gas supply manifold and method of supplying gases to chamber using same
ASM IP HOLDING BV8 citations81
US11624113B2Apr 11, 2023
Heating zone separation for reactant evaporation system
ASM IP HOLDING BV3 citations73
US11501956B2Nov 15, 2022
Semiconductor reaction chamber showerhead
ASM IP HOLDING BV5 citations73
US11634812B2Apr 25, 2023
Solid source sublimator
ASM IP HOLDING BV1 citations72
US10832903B2Nov 10, 2020
Process feed management for semiconductor substrate processing
ASM IP HOLDING BV4 citations72
US12540391B2Feb 3, 2026
Solid source sublimator
ASM IP HOLDING BV0 citations62
US11773486B2Oct 3, 2023
Solid source sublimator
ASM IP HOLDING BV0 citations62
US11626313B2Apr 11, 2023
Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination
ASM IP HOLDING BV0 citations62
US12247286B2Mar 11, 2025
Heater assembly including cooling apparatus and method of using same
ASM IP HOLDING BV0 citations61
US11926894B2Mar 12, 2024
Reactant vaporizer and related systems and methods
ASM IP HOLDING BV0 citations52
US12546008B2Feb 10, 2026
Process chamber volume adjustment
ASM IP HOLDING BV0 citations51
US12163225B2Dec 10, 2024
Temperature-controlled chemical delivery system and reactor system including same
ASM IP HOLDING BV0 citations50
US12467140B2Nov 11, 2025
Showerhead assembly and components
ASM IP HOLDING BV0 citations47
US11976359B2May 7, 2024
Gas supply assembly, components thereof, and reactor system including same
ASM IP HOLDING BV0 citations42