Inventor
TSUJIMURA MANABU
JP57 patents
⚠️ This page may combine multiple inventors who share the name “TSUJIMURA MANABU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
32 patentsUS5868866AFeb 9, 1999
Method of and apparatus for cleaning workpiece
EBARA CORP155 citations99
US6294059B1Sep 25, 2001
Substrate plating apparatus
EBARA CORP83 citations98
US5679059AOct 21, 1997
Polishing aparatus and method
EBARA CORP110 citations98
US5476414ADec 19, 1995
Polishing apparatus
EBARA CORP122 citations98
US6632335B2Oct 14, 2003
Plating apparatus
EBARA CORP114 citations97
US5885138AMar 23, 1999
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
EBARA CORP75 citations97
US6435949B1Aug 20, 2002
Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereof
EBARA CORP71 citations96
US6332826B1Dec 25, 2001
Polishing apparatus
EBARA CORP34 citations96
US6939208B2Sep 6, 2005
Polishing apparatus
EBARA CORP42 citations95
US5704827AJan 6, 1998
Polishing apparatus including cloth cartridge connected to turntable
EBARA CORP67 citations95
US7150673B2Dec 19, 2006
Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus
EBARA CORP15 citations93
US5746581AMay 5, 1998
Method and apparatus for evacuating vacuum system
EBARA CORP41 citations93
US7101255B2Sep 5, 2006
Polishing apparatus
EBARA CORP15 citations92
US7040968B2May 9, 2006
Polishing apparatus
EBARA CORP28 citations92
US6918814B2Jul 19, 2005
Polishing apparatus
EBARA CORP15 citations92
US6706422B2Mar 16, 2004
Electroless Ni—B plating liquid, electronic device and method for manufacturing the same
EBARA CORP16 citations92
US6500051B1Dec 31, 2002
Polishing apparatus and method
EBARA CORP25 citations92
US6413146B1Jul 2, 2002
Polishing apparatus
EBARA CORP17 citations92
US6406364B1Jun 18, 2002
Polishing solution feeder
EBARA CORP25 citations92
US5632868AMay 27, 1997
Method and apparatus for generating ozone and methods of its use
EBARA CORP24 citations92
US5705230AJan 6, 1998
Method for filling small holes or covering small recesses in the surface of substrates
EBARA CORP43 citations91
US7234999B2Jun 26, 2007
Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus
EBARA CORP12 citations84
US6547638B2Apr 15, 2003
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
EBARA CORP12 citations82
US7588671B2Sep 15, 2009
Microfluidic treatment method and device
EBARA CORP12 citations79
US6626736B2Sep 30, 2003
Polishing apparatus
EBARA CORP11 citations74
US6783427B2Aug 31, 2004
Polishing system with air exhaust system
EBARA CORP9 citations73
US5702673ADec 30, 1997
Ozone generating apparatus
EBARA CORP8 citations73
US5236562AAug 17, 1993
Method for discharging hydrogen from a vacuum vessel using a roughing vacuum pump and a turbo-molecular pump
EBARA CORP16 citations73
US7361076B2Apr 22, 2008
Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus
EBARA CORP4 citations63
US6966821B2Nov 22, 2005
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
EBARA CORP2 citations63
USRE38878ENov 15, 2005
Polishing apparatus
EBARA CORP6 citations63
US6929722B2Aug 16, 2005
Substrate plating apparatus
EBARA CORP2 citations63
TOSHIBA KK
10 patentsUS6443808B2Sep 3, 2002
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
TOSHIBA KK14 citations93
US6439971B2Aug 27, 2002
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
TOSHIBA KK20 citations93
US6425806B2Jul 30, 2002
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
TOSHIBA KK14 citations93
US6997782B2Feb 14, 2006
Polishing apparatus and a method of polishing and cleaning and drying a wafer
TOSHIBA KK16 citations92
US5656542AAug 12, 1997
Method for manufacturing wiring in groove
TOSHIBA KK25 citations92
US5062271ANov 5, 1991
Evacuation apparatus and evacuation method
TOSHIBA KK45 citations92
US6273802B1Aug 14, 2001
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
TOSHIBA KK14 citations82
USRE36610EMar 14, 2000
Evacuation apparatus and evacuation method
TOSHIBA KK7 citations73
US5500559AMar 19, 1996
Semiconductor device and method for manufacturing the same
TOSHIBA KK11 citations73
US6936302B2Aug 30, 2005
Electroless Ni-B plating liquid, electronic device and method for manufacturing the same
TOSHIBA KK2 citations63
DENSO CORP
4 patentsUS7895990B2Mar 1, 2011
Fuel injection system with injection characteristic learning function
DENSO CORP17 citations84
US7650226B2Jan 19, 2010
Fuel injection system with learning control to compensate for actual-to-target injection quantity
DENSO CORP9 citations84
US7891337B2Feb 22, 2011
Fuel injection system with injection characteristic learning function
DENSO CORP15 citations83
US7599784B2Oct 6, 2009
Fuel injection system learning average of injection quantities for correcting injection characteristic of fuel injector
DENSO CORP7 citations74
TOSHIBA CORP
1 patentKATSUOKA SEIJI
1 patent(unassigned)
1 patentTAKEDA CHEMICAL INDUSTRIES LTD
1 patentShowing the top 50 of 57 patents by PatentIndex Score.