Inventor

TOGAWA TETSUJI

JP147 patents

⚠️ This page may combine multiple inventors who share the name “TOGAWA TETSUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

47 patents

USD634719SMar 22, 2011

Elastic membrane for semiconductor wafer polishing apparatus

EBARA CORP539 citations99

US6609962B1Aug 26, 2003

Dressing apparatus and polishing apparatus

EBARA CORP85 citations98

US5679059AOct 21, 1997

Polishing aparatus and method

EBARA CORP110 citations98

US5830045ANov 3, 1998

Polishing apparatus

EBARA CORP95 citations97

US7357699B2Apr 15, 2008

Substrate holding apparatus and polishing apparatus

EBARA CORP49 citations96

US7223690B2May 29, 2007

Substrate processing method

EBARA CORP41 citations96

US6878044B2Apr 12, 2005

Polishing apparatus

EBARA CORP47 citations96

US6852019B2Feb 8, 2005

Substrate holding apparatus

EBARA CORP49 citations96

US6790763B2Sep 14, 2004

Substrate processing method

EBARA CORP57 citations96

US6358128B1Mar 19, 2002

Polishing apparatus

EBARA CORP61 citations96

US6050884AApr 18, 2000

Polishing apparatus

EBARA CORP57 citations96

US5860847AJan 19, 1999

Polishing apparatus

EBARA CORP63 citations96

US5839947ANov 24, 1998

Polishing apparatus

EBARA CORP58 citations96

US5643067AJul 1, 1997

Dressing apparatus and method

EBARA CORP87 citations96

US5885134AMar 23, 1999

Polishing apparatus

EBARA CORP81 citations95

US10040166B2Aug 7, 2018

Polishing apparatus

EBARA CORP11 citations93

US7207862B2Apr 24, 2007

Polishing apparatus and method for detecting foreign matter on polishing surface

EBARA CORP37 citations93

US7150673B2Dec 19, 2006

Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus

EBARA CORP15 citations93

US6957998B2Oct 25, 2005

Polishing apparatus

EBARA CORP20 citations93

US6953390B2Oct 11, 2005

Polishing apparatus

EBARA CORP30 citations93

US6926585B2Aug 9, 2005

Pressure control system and polishing apparatus

EBARA CORP18 citations93

US6578891B1Jun 17, 2003

Substrate holder and substrate transfer apparatus using the same

EBARA CORP49 citations93

US6458012B1Oct 1, 2002

Polishing apparatus

EBARA CORP18 citations93

US6390901B1May 21, 2002

Polishing apparatus

EBARA CORP51 citations93

US6328629B1Dec 11, 2001

Method and apparatus for polishing workpiece

EBARA CORP37 citations93

US6241578B1Jun 5, 2001

Carrier device in polishing apparatus and method for controlling carrier device

EBARA CORP28 citations93

US5670011ASep 23, 1997

Apparatus and method for polishing workpiece

EBARA CORP36 citations93

US5647792AJul 15, 1997

Polishing apparatus

EBARA CORP23 citations93

US7670206B2Mar 2, 2010

Substrate polishing apparatus and substrate polishing method

EBARA CORP27 citations92

US7632378B2Dec 15, 2009

Polishing apparatus

EBARA CORP15 citations92

US7311585B2Dec 25, 2007

Substrate holding apparatus and polishing apparatus

EBARA CORP15 citations92

US7083507B2Aug 1, 2006

Substrate holding apparatus

EBARA CORP14 citations92

US7033260B2Apr 25, 2006

Substrate holding device and polishing device

EBARA CORP20 citations92

US6828225B2Dec 7, 2004

Substrate processing method

EBARA CORP27 citations92

US6682408B2Jan 27, 2004

Polishing apparatus

EBARA CORP21 citations92

US6500051B1Dec 31, 2002

Polishing apparatus and method

EBARA CORP25 citations92

US6413154B1Jul 2, 2002

Polishing apparatus

EBARA CORP25 citations92

US6354922B1Mar 12, 2002

Polishing apparatus

EBARA CORP50 citations92

US6354918B1Mar 12, 2002

Apparatus and method for polishing workpiece

EBARA CORP53 citations92

US6338669B1Jan 15, 2002

Polishing device

EBARA CORP33 citations92

US6319105B1Nov 20, 2001

Polishing apparatus

EBARA CORP44 citations92

US6312312B1Nov 6, 2001

Polishing apparatus

EBARA CORP27 citations92

US6283822B1Sep 4, 2001

Polishing apparatus

EBARA CORP19 citations92

US6042455AMar 28, 2000

Polishing apparatus

EBARA CORP20 citations92

US5934984AAug 10, 1999

Polishing apparatus

EBARA CORP36 citations92

US5931723AAug 3, 1999

Polishing apparatus

EBARA CORP21 citations92

US5893794AApr 13, 1999

Polishing apparatus having robotic transport apparatus

EBARA CORP25 citations92

TOSHIBA KK

2 patents

US5827110AOct 27, 1998

Polishing facility

TOSHIBA KK64 citations94

US6997782B2Feb 14, 2006

Polishing apparatus and a method of polishing and cleaning and drying a wafer

TOSHIBA KK16 citations92

NABEYA OSAMU

1 patent

US8083571B2Dec 27, 2011

Polishing apparatus

NABEYA OSAMU22 citations92

Showing the top 50 of 147 patents by PatentIndex Score.