Inventor · disambiguated record

Stephan Minard

Also filed as: MINARD STEPHAN

1 granted patent·89 citations·filing 2003–2003

52Inventor score

Technology areasH10P

Files withNOVELLUS SYSTEMS INC1

Top patents by PatentIndex Score

1 record

0189US6934606B1Automatic calibration of a wafer-handling robotNOVELLUS SYSTEMS INC·Filed 2003·Granted Aug 23, 2005·89 cites·25 claims

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