Inventor · disambiguated record
Mitsuhiko Inaba
Also filed as: INABA MITSUHIKO
10 granted patents·2 pending applications·4 citations·filing 2017–2023
79Inventor score
Technology areasH10P
Files withEBARA CORP12
Top patents by PatentIndex Score
12 records- 0180US12002688B2Substrate cleaning device and substrate cleaning methodEBARA CORP·Filed 2023·Granted Jun 4, 2024·0 cites·6 claims
- 0279US11996303B2Substrate cleaning device and substrate cleaning methodEBARA CORP·Filed 2023·Granted May 28, 2024·0 cites·4 claims
- 0376US10688622B2Substrate processing apparatusEBARA CORP·Filed 2017·Granted Jun 23, 2020·2 cites·19 claims
- 0475US11164757B2Substrate cleaning device and substrate cleaning methodEBARA CORP·Filed 2019·Granted Nov 2, 2021·1 cites·5 claims
- 0570US2022020610A1Substrate cleaning device and substrate cleaning methodEBARA CORP·Filed 2021·Application pending·0 cites
- 0668US10573509B2Cleaning apparatus and substrate processing apparatusEBARA CORP·Filed 2017·Granted Feb 25, 2020·1 cites·11 claims
- 0761US12020976B2Substrate processing apparatus and method for removing substrate from table of substrate processing apparatusEBARA CORP·Filed 2021·Granted Jun 25, 2024·0 cites·9 claims
- 0854US10991615B2Substrate processing apparatus and method for removing substrate from table of substrate processing apparatusEBARA CORP·Filed 2018·Granted Apr 27, 2021·0 cites·4 claims
- 0950US10818531B2Substrate transport system, substrate processing apparatus, hand position adjustment methodEBARA CORP·Filed 2018·Granted Oct 27, 2020·0 cites·22 claims
- 1042US2019378740A1Teaching apparatus and teaching method for substrate transfer systemEBARA CORP·Filed 2019·Application pending·0 cites
- 1141US11869788B2Substrate processing deviceEBARA CORP·Filed 2018·Granted Jan 9, 2024·0 cites·36 claims
- 1241US11380561B2Cleaning device, substrate processing apparatus, maintenance method of cleaning device, and computer-readable recording medium including maintenance program of cleaning deviceEBARA CORP·Filed 2018·Granted Jul 5, 2022·0 cites·8 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →