Inventor · disambiguated record
Wataru Kusaki
Also filed as: KUSAKI WATARU
15 granted patents·3 pending applications·533 citations·filing 1999–2011
93Inventor score
Top patents by PatentIndex Score
18 records- 0198US7771914B2Resist composition and patterning processSHINETSU CHEMICAL CO·Filed 2007·Granted Aug 10, 2010·90 cites·18 claims
- 0298US7537880B2Polymer, resist composition, and patterning processSHINETSU CHEMICAL CO·Filed 2007·Granted May 26, 2009·258 cites·10 claims
- 0398US6440634B1Onium salts, photoacid generators for resist compositions, resist compositions, and patterning processSHINETSU CHEMICAL CO·Filed 2000·Granted Aug 27, 2002·76 cites·33 claims
- 0496US7514204B2Resist composition and patterning processSHINETSU CHEMICAL CO·Filed 2007·Granted Apr 7, 2009·40 cites·12 claims
- 0593US7629108B2Nitrogen-containing organic compound, resist composition and patterning processSHINETSU CHEMICAL CO·Filed 2007·Granted Dec 8, 2009·16 cites·10 claims
- 0680US9034661B2Method for producing molecule immobilizing substrate, and molecule immobilizing substrateKUSAKI WATARU·Filed 2010·Granted May 19, 2015·4 cites·7 claims
- 0774US9410951B2Method for producing substrate for making microarrayKUSAKI WATARU·Filed 2009·Granted Aug 9, 2016·4 cites·5 claims
- 0864US6197109B1Method for producing low defect silicon single crystal doped with nitrogenSHINETSU HANDOTAI KK·Filed 1999·Granted Mar 6, 2001·17 cites·8 claims
- 0955US6641975B2Resist composition and patterning processSHINETSU CHEMICAL CO·Filed 2001·Granted Nov 4, 2003·12 cites·7 claims
- 1051US8367311B2Method for producing hollow structureSHINETSU CHEMICAL CO·Filed 2010·Granted Feb 5, 2013·0 cites·20 claims
- 1151US6861198B2Negative resist material and pattern formation method using the sameSHINETSU CHEMICAL CO·Filed 2003·Granted Mar 1, 2005·9 cites·22 claims
- 1250US2008233292A1Method for manufacturing substrate for microarraySHINETSU CHEMICAL CO·Filed 2008·Application pending·0 cites
- 1349US2008233409A1Method for manufacturing substrate for making microarraySHINETSU CHEMICAL CO·Filed 2008·Application pending·0 cites
- 1448US8053179B2Method for manufacturing substrate for making microarraySHINETSU CHEMICAL CO·Filed 2008·Granted Nov 8, 2011·0 cites·9 claims
- 1547US2008090173A1Polymer, resist composition, and patterning processSHINETSU CHEMICAL CO·Filed 2007·Application pending·0 cites
- 1646US8541158B2Positive resist compositions and patterning processKUSAKI WATARU·Filed 2011·Granted Sep 24, 2013·0 cites·7 claims
- 1746US6737214B2Chemical amplification resist compositionsSHINETSU CHEMICAL CO·Filed 2001·Granted May 18, 2004·7 cites·16 claims
- 1845US8148053B2Method for manufacturing substrate for making microarrayKUSAKI WATARU·Filed 2008·Granted Apr 3, 2012·0 cites·24 claims
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