Inventor · disambiguated record
Jens Fittkau
Also filed as: FITTKAU JENS
7 granted patents·1 pending application·48 citations·filing 2002–2022
84Inventor score
Top patents by PatentIndex Score
8 records- 0189US7264006B2Ozonated water flow and concentration control apparatus and methodMKS INSTR INC·Filed 2005·Granted Sep 4, 2007·17 cites·26 claims
- 0277US8339607B2Ozone concentration sensorLEVINE STEPHAN·Filed 2011·Granted Dec 25, 2012·3 cites·26 claims
- 0372US6948504B2Ozonated water flow and concentration control methodMKS INSTR INC·Filed 2004·Granted Sep 27, 2005·13 cites·10 claims
- 0467US6805791B2Ozonated water flow and concentration control apparatusAPPLIED SCIENCE & TECH INC·Filed 2002·Granted Oct 19, 2004·10 cites·5 claims
- 0563US7622037B2Ozonated water flow and concentration control apparatus and methodMKS INSTR INC·Filed 2007·Granted Nov 24, 2009·1 cites·18 claims
- 0663US7502114B2Ozone concentration sensorMKS INSTR INC·Filed 2004·Granted Mar 10, 2009·4 cites·37 claims
- 0756US8085401B2Ozone concentration sensorLEVINE STEPHAN·Filed 2009·Granted Dec 27, 2011·0 cites·26 claims
- 0851US2022390840A1Light-Enhanced Ozone Wafer Processing System and Method of UseMKS INSTR INC·Filed 2022·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →