Inventor
BOYD JR WENDELL GLEN
US8 patents
⚠️ This page may combine multiple inventors who share the name “BOYD JR WENDELL GLEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS9805965B2Oct 31, 2017
Pixelated capacitance controlled ESC
APPLIED MATERIALS INC54 citations96
US9536769B1Jan 3, 2017
Pixelated capacitance controlled ESC
APPLIED MATERIALS INC11 citations82
US11260498B2Mar 1, 2022
Method of polishing a new or a refurbished electrostatic chuck
APPLIED MATERIALS INC5 citations81
US10879046B2Dec 29, 2020
Substrate support with real time force and film stress control
APPLIED MATERIALS INC2 citations71
US10557202B2Feb 11, 2020
Method of processing a substrate support assembly
APPLIED MATERIALS INC1 citations62
US10347522B2Jul 9, 2019
Method to remove residual charge on a electrostatic chuck during the de-chucking step
APPLIED MATERIALS INC0 citations51
US9580806B2Feb 28, 2017
Method of processing a substrate support assembly
APPLIED MATERIALS INC1 citations48