P

Inventor

KATO TAKAO

JP112 patents
⚠️ This page may combine multiple inventors who share the name “KATO TAKAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

15 patents
US5852298ADec 22, 1998

Micro-processing apparatus and method therefor

EBARA CORP115 citations97
US6015976AJan 18, 2000

Fabrication apparatus employing energy beam

EBARA CORP51 citations96
US5868952AFeb 9, 1999

Fabrication method with energy beam

EBARA CORP73 citations96
US7312449B2Dec 25, 2007

Electron beam system and method of manufacturing devices using the system

EBARA CORP20 citations93
US7129485B2Oct 31, 2006

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

EBARA CORP30 citations93
US7005641B2Feb 28, 2006

Electron beam apparatus and a device manufacturing method by using said electron beam apparatus

EBARA CORP35 citations93
US6853143B2Feb 8, 2005

Electron beam system and method of manufacturing devices using the system

EBARA CORP23 citations93
US7256405B2Aug 14, 2007

Sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method

EBARA CORP21 citations92
US7888642B2Feb 15, 2011

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

EBARA CORP9 citations84
US7205559B2Apr 17, 2007

Electron beam apparatus and device manufacturing method using same

EBARA CORP14 citations84
US7012251B2Mar 14, 2006

Electron beam apparatus, a pattern evaluation method and a device manufacturing method using the electron beam apparatus or pattern evaluation method

EBARA CORP11 citations84
US6972256B2Dec 6, 2005

Method and apparatus for forming thin film of metal

EBARA CORP17 citations84
US6730596B1May 4, 2004

Method of and apparatus for forming interconnection

EBARA CORP19 citations84
US5739528AApr 14, 1998

Fast atom beam source

EBARA CORP17 citations84
US7423267B2Sep 9, 2008

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

EBARA CORP8 citations74

HITACHI LTD

13 patents

MITSUMI ELECTRIC CO LTD

7 patents

CANON KK

4 patents

FUJITSU LTD

2 patents

TOSHIBA KK

2 patents

OKI ELECTRIC IND CO LTD

2 patents

NIKON CORP

1 patent

ANELVA CORP

1 patent

LION CORP

1 patent

TOSOH CORP

1 patent

MITSUBISHI ELECTRIC CORP

1 patent

Showing the top 50 of 112 patents by PatentIndex Score.