Inventor
NITADORI HIROMI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “NITADORI HIROMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS7896648B2Mar 1, 2011
Vertical heat processing apparatus and heat processing method using the vertical heat processing apparatus
TOKYO ELECTRON LTD10 citations82
US10475641B2Nov 12, 2019
Substrate processing apparatus
TOKYO ELECTRON LTD4 citations71
USD525408SJul 18, 2006
Wafer conveyor arm for semiconductor manufacturing equipment
TOKYO ELECTRON LTD7 citations71
US7922485B2Apr 12, 2011
Vertical type heat processing apparatus and vertical type heat processing method
TOKYO ELECTRON LTD5 citations61
US7798811B2Sep 21, 2010
Vertical type heat processing apparatus and vertical type heating method
TOKYO ELECTRON LTD5 citations61
US12557593B2Feb 17, 2026
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations49
US12398830B2Aug 26, 2025
Piping structure and processing apparatus
TOKYO ELECTRON LTD0 citations49
US11302542B2Apr 12, 2022
Processing apparatus
TOKYO ELECTRON LTD0 citations47
US10720312B2Jul 21, 2020
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations36