USD525408SExpiredUtility

Wafer conveyor arm for semiconductor manufacturing equipment

46
Assignee: TOKYO ELECTRON LTDPriority: Dec 17, 2003Filed: Jun 14, 2004Granted: Jul 18, 2006
Est. expiryDec 17, 2023(expired)· nominal 20-yr term from priority
Inventors:Hiromi Nitadori
46
PatentIndex Score
7
Cited by
7
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       I claim the ornamental design for wafer conveyor arm for semiconductor manufacturing equipment, as shown and described.

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