Inventor
HAYAMA TAKAHIRO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “HAYAMA TAKAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JSR CORP
6 patentsUS9268225B2Feb 23, 2016
Composition, resist pattern-forming method, compound, method for production of compound, and polymer
JSR CORP2 citations60
US10319605B2Jun 11, 2019
Semiconductor treatment composition and treatment method
JSR CORP1 citations59
US10304694B2May 28, 2019
Semiconductor treatment composition and treatment method
JSR CORP1 citations59
US9926462B2Mar 27, 2018
Composition for forming liquid immersion upper layer film, and polymer
JSR CORP0 citations49
US9540535B2Jan 10, 2017
Composition for forming liquid immersion upper layer film, and polymer
JSR CORP0 citations49
US9920287B2Mar 20, 2018
Cleaning composition and cleaning method
JSR CORP1 citations46