Inventor

YANG CHIN-CHENG

TW69 patents

⚠️ This page may combine multiple inventors who share the name “YANG CHIN-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YANG CHIN-CHENG

MACRONIX INT CO LTD

Method for making multilayer connection structure

Multilayer 3-D structure with mirror image landing regions

Interlevel connectors in multilevel circuitry, and method for forming the same

Pad structure and manufacturing method thereof

LC module layout arrangement for contact opening etch windows

Method of patterning target layer on substrate

Method of forming mark in IC-fabricating process

Method for determining an overlay correlation set

Pattern registration mark designs for use in photolithography and methods of using the same

Methods for forming a photoresist pattern using an anti-optical proximity effect

Method of improving overlay performance in semiconductor manufacture

Method of fabricating shallow trench isolation structure

Mask for reducing proximity effect

Method of forming semiconductor device

Multilayer connection structure

Interconnect structure and fabricating method thereof

Layout design for fanout patterns in self-aligned double patterning process

Semiconductor structure and manufacturing method thereof

Memory device and flash memory device with improved support for staircase regions

Method for forming separate narrow lines, method for fabricating memory structure, and product thereof

Double patterning by PTD and NTD process

Overlay mark arrangement for reducing overlay shift

Method of enabling alignment of wafer in exposure step of IC process after UV-blocking metal layer is formed over the whole wafer

Patterning process

Overlay mark and application thereof

Method for fabricating semiconductor wafer with enhanced alignment performance

Method for checking alignment accuracy using overlay mark

Method of exposure for lithography process and mask therefor

Photomask and method of manufacturing the same

Method for forming shallow trench isolation region

Mixing and matching method and integration system for providing backup strategries for optical environments and method for operating the same

Fine line printing by trimming the sidewalls of pre-developed resist image

Method for patterning material layer

Memory device and manufacturing method thereof

Semiconductor structure and method forming the same

Method for forming an aligned mask

Patterned material layer and patterning method

Patterning method and semiconductor structure

Semiconductor device and method for fabricating the same

Coating method and coating system

YANG CHIN-CHENG

Patterning process

Overlay mark

Overlay mark, method of checking local aligmnent using the same and method of controlling overlay based on the same

Semiconductor devices and methods of manufacturing the same

Method of forming mark in IC-fabricating process

Alignment mark

YANG CHIN CHENG

Double patterning by PTD and NTD process

Wafer centering hardware design and process

Lithography process and structures

NCR CO

Character display system