Inventor
CHEN TING-YEH
TW34 patents
Patents
34 patentsUS9287403B1Mar 15, 2016
FinFET and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD44 citations98
US9570556B1Feb 14, 2017
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD27 citations94
US9748389B1Aug 29, 2017
Method for semiconductor device fabrication with improved source drain epitaxy
TAIWAN SEMICONDUCTOR MFG CO LTD12 citations92
US9129988B1Sep 8, 2015
FinFET and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD17 citations92
US9812576B2Nov 7, 2017
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US12087837B2Sep 10, 2024
Semiconductor device with backside contact and methods of forming such
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11257928B2Feb 22, 2022
Method for epitaxial growth and device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11107734B2Aug 31, 2021
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11011634B2May 18, 2021
Elongated source/drain region structure in finFET device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10872889B2Dec 22, 2020
Semiconductor component and fabricating method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10158007B2Dec 18, 2018
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9865504B2Jan 9, 2018
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations73
US9741831B2Aug 22, 2017
FinFET and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9343575B1May 17, 2016
FinFET and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10158017B2Dec 18, 2018
Semiconductor structure and method for semiconductor device fabrication with improved source drain epitaxy
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63
US12507446B2Dec 23, 2025
Semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12369334B2Jul 22, 2025
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12154947B2Nov 26, 2024
Methods of forming epitaxial source/drain features in semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12125889B2Oct 22, 2024
Source/drain contact with low-k contact etch stop layer and method of fabricating thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12002845B2Jun 4, 2024
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11996467B2May 28, 2024
Method for epitaxial growth and device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11855167B2Dec 26, 2023
Structure and formation method of semiconductor device with nanosheet structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11735660B2Aug 22, 2023
Method of forming semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11710792B2Jul 25, 2023
Semiconductor structure with improved source drain epitaxy
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11688794B2Jun 27, 2023
Method for epitaxial growth and device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11289574B2Mar 29, 2022
Methods of forming epitaxial source/drain features in semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11031498B2Jun 8, 2021
Semiconductor structure with improved source drain epitaxy
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12581691B2Mar 17, 2026
Methods of manufacturing semiconductor devices and semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12464769B2Nov 4, 2025
Semiconductor device with epitaxial bridge feature and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12396220B2Aug 19, 2025
Isolation structures in multi-gate field-effect transistors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12382660B2Aug 5, 2025
Structure and formation method of semiconductor device with embedded epitaxial structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US11855225B2Dec 26, 2023
Semiconductor device with epitaxial bridge feature and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10629736B2Apr 21, 2020
Semiconductor structure and method for semiconductor device fabrication with improved source drain epitaxy
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12532532B2Jan 20, 2026
Epitaxial features in semiconductor devices and method of manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51