Inventor
KITABAYASHI TETSUO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “KITABAYASHI TETSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOTO LTD
9 patentsUS5117121AMay 26, 1992
Method of and apparatus for applying voltage to electrostatic chuck
TOTO LTD431 citations99
US5151845ASep 29, 1992
Electrostatic chuck
TOTO LTD122 citations98
US5384682AJan 24, 1995
Electrostatic chuck
TOTO LTD56 citations96
US5530616AJun 25, 1996
Electrostastic chuck
TOTO LTD106 citations95
US6768627B1Jul 27, 2004
Electrostatic chuck and processing apparatus for insulative substrate
TOTO LTD63 citations93
US7209339B2Apr 24, 2007
Electrostatic chuck for an electrically insulative substrate, and a method of using same
TOTO LTD30 citations90
US5384681AJan 24, 1995
Electrostatic chuck
TOTO LTD18 citations82
US7450365B2Nov 11, 2008
Electrostatic chuck
TOTO LTD3 citations62
US7248457B2Jul 24, 2007
Electrostatic chuck
TOTO LTD3 citations62