Inventor

KIEHLBAUCH MARK

US41 patents

⚠️ This page may combine multiple inventors who share the name “KIEHLBAUCH MARK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KIEHLBAUCH MARK

MICRON TECHNOLOGY INC

Spacer process for on pitch contacts and related structures

Methods of forming patterns utilizing lithography and spacers

Methods of modifying oxide spacers

Methods of forming a plurality of transistor gates, and methods of forming a plurality of transistor gates having at least two different work functions

Methods of forming a plurality of transistor gates, and methods of forming a plurality of transistor gates having at least two different work functions

Semiconductor processing methods, and methods of forming flash memory structures

Apparatus and methods for capacitively coupled plasma vapor processing of semiconductor wafers

Capacitor forming methods

Capacitor forming methods

Apparatus and methods for capacitively coupled plasma vapor processing of semiconductor wafers

Methods of forming capacitors

Reverse masking profile improvements in high aspect ratio etch

Semiconductor constructions, and semiconductor processing methods

Methods of forming capacitors

Semiconductor constructions, and semiconductor processing methods

Semiconductor constructions

Methods of forming a substrate opening

Plasma processing with preionized and predissociated tuning gases and associated systems and methods

Methods of forming a substrate opening

Semiconductor constructions

Reverse masking profile improvements in high aspect ratio etch

KIEHLBAUCH MARK

Selective etch chemistries for forming high aspect ratio features and associated structures

Methods of making capacitors

Capacitor forming methods

Methods of forming capacitors

Methods of forming capacitors

Methods of forming capacitors

Semiconductor constructions

Plasma processing with preionized and predissociated tuning gases and associated systems and methods

Semiconductor processing methods

Methods of patterning a substrate

Methods of forming contact openings and methods of increasing contact area in only one of X and Y axes in the fabrication of integrated circuitry

Methods for treating surfaces, and methods for removing one or more materials from surfaces

SANDHU GURTEJ

Spacer process for on pitch contacts and related structures

Spacer process for on pitch contacts and related structures

MICRON TECHNOLOGIES INC

Selective etch chemistries for forming high aspect ratio features and associated structures

BENSON RUSSELL A

Method of etching a high aspect ratio contact

SANDHU GURTEJ S

Methods of forming a plurality of transistor gates, and methods of forming a plurality of transistor gates having at least two different work functions

WILSON AARON

Chemistry and compositions for manufacturing integrated circuits

GREELEY JOSEPH NEIL

Methods of modifying oxide spacers

ZHU HONGBIN

Methods of plasma etching platinum-comprising materials, methods of processing semiconductor substrates in the fabrication of integrated circuitry, and methods of forming a plurality of memory cells