Inventor
OUTKA DUANE
US35 patents
⚠️ This page may combine multiple inventors who share the name “OUTKA DUANE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
20 patentsUS6350697B1Feb 26, 2002
Method of cleaning and conditioning plasma reaction chamber
LAM RES CORP281 citations98
US7638004B1Dec 29, 2009
Method for cleaning microwave applicator tube
LAM RES CORP8 citations83
US10967407B2Apr 6, 2021
Conditioning chamber component
LAM RES CORP3 citations71
US7811409B2Oct 12, 2010
Bare aluminum baffles for resist stripping chambers
LAM RES CORP6 citations71
US6770214B2Aug 3, 2004
Method of reducing aluminum fluoride deposits in plasma etch reactor
LAM RES CORP7 citations71
US9337002B2May 10, 2016
Corrosion resistant aluminum coating on plasma chamber components
LAM RES CORP6 citations69
US11124659B2Sep 21, 2021
Method to selectively pattern a surface for plasma resistant coat applications
LAM RES CORP0 citations62
US7976641B1Jul 12, 2011
Extending storage time of removed plasma chamber components prior to cleaning thereof
LAM RES CORP3 citations62
US12544809B2Feb 10, 2026
Conditioning chamber component
LAM RES CORP0 citations61
US12064795B2Aug 20, 2024
Conditioning chamber component
LAM RES CORP0 citations61
US12072318B2Aug 27, 2024
Chamber component cleanliness measurement system
LAM RES CORP0 citations58
US11384430B2Jul 12, 2022
Method for conditioning a ceramic coating
LAM RES CORP0 citations58
US9120201B2Sep 1, 2015
Platen and adapter assemblies for facilitating silicon electrode polishing
LAM RES CORP0 citations52
US9387521B2Jul 12, 2016
Method of wet cleaning aluminum chamber parts
LAM RES CORP0 citations51
US8859432B2Oct 14, 2014
Bare aluminum baffles for resist stripping chambers
LAM RES CORP0 citations50
US12270748B2Apr 8, 2025
Method and apparatus for measuring particles
LAM RES CORP0 citations49
US9689533B2Jun 27, 2017
Coating method for gas delivery system
LAM RES CORP0 citations49
US7736441B2Jun 15, 2010
Cleaning fixtures and methods of cleaning electrode assembly plenums
LAM RES CORP1 citations49
US9766063B2Sep 19, 2017
Method for treating a nonhomogenous surface
LAM RES CORP0 citations48
US9393666B2Jul 19, 2016
Adapter plate for polishing and cleaning electrodes
LAM RES CORP0 citations40
AVOYAN ARMEN
4 patentsUS8276898B2Oct 2, 2012
Electrode transporter and fixture sets incorporating the same
AVOYAN ARMEN9 citations83
US8075701B2Dec 13, 2011
Processes for reconditioning multi-component electrodes
AVOYAN ARMEN7 citations83
US8075703B2Dec 13, 2011
Immersive oxidation and etching process for cleaning silicon electrodes
AVOYAN ARMEN4 citations62
US8550880B2Oct 8, 2013
Platen and adapter assemblies for facilitating silicon electrode polishing
AVOYAN ARMEN0 citations51
SHIH HONG
4 patentsUS8585844B2Nov 19, 2013
Extending lifetime of yttrium oxide as a plasma chamber material
SHIH HONG2 citations62
US8097105B2Jan 17, 2012
Extending lifetime of yttrium oxide as a plasma chamber material
SHIH HONG5 citations62
US8545639B2Oct 1, 2013
Method of cleaning aluminum plasma chamber parts
SHIH HONG1 citations51
US8216388B2Jul 10, 2012
Extending storage time of removed plasma chamber components prior to cleaning thereof
SHIH HONG0 citations51