Inventor
MEAGLEY ROBERT P
US40 patents
⚠️ This page may combine multiple inventors who share the name “MEAGLEY ROBERT P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
37 patentsUS6566280B1May 20, 2003
Forming polymer features on a substrate
INTEL CORP297 citations99
US6858528B2Feb 22, 2005
Composite sacrificial material
INTEL CORP17 citations93
US7259109B2Aug 21, 2007
Electrospray and enhanced electrospray deposition of thin films on semiconductor substrates
INTEL CORP25 citations92
US7169715B2Jan 30, 2007
Forming a dielectric layer using porogens
INTEL CORP18 citations92
US6991893B2Jan 31, 2006
Controlling resist profiles through substrate modification
INTEL CORP20 citations92
US7241707B2Jul 10, 2007
Layered films formed by controlled phase segregation
INTEL CORP22 citations90
US7344972B2Mar 18, 2008
Photosensitive dielectric layer
INTEL CORP16 citations84
US7192686B2Mar 20, 2007
Photoacid generators based on novel superacids
INTEL CORP13 citations84
US7018920B2Mar 28, 2006
Composite sacrificial material
INTEL CORP12 citations84
US6833320B2Dec 21, 2004
Removing sacrificial material by thermal decomposition
INTEL CORP14 citations84
US7678527B2Mar 16, 2010
Methods and compositions for providing photoresist with improved properties for contacting liquids
INTEL CORP11 citations82
US7135419B2Nov 14, 2006
Line edge roughness reduction
INTEL CORP7 citations74
US7101798B2Sep 5, 2006
Method to modulate etch rate in SLAM
INTEL CORP8 citations74
US6872513B2Mar 29, 2005
Photoresist edge correction
INTEL CORP8 citations74
US7214452B2May 8, 2007
Using perfluoropoly-ethers to form pellicles
INTEL CORP6 citations73
US7084053B2Aug 1, 2006
Unidirectionally conductive materials for interconnection
INTEL CORP5 citations73
US7071125B2Jul 4, 2006
Precursors for film formation
INTEL CORP8 citations71
US6872505B1Mar 29, 2005
Enabling chain scission of branched photoresist
INTEL CORP8 citations71
US6908717B2Jun 21, 2005
Positive photosensitive resin composition, process for its preparation, and semiconductor devices
INTEL CORP9 citations70
US7875415B2Jan 25, 2011
Helical pixilated photoresist
INTEL CORP3 citations63
US7658975B2Feb 9, 2010
Sealing porous dielectric materials
INTEL CORP2 citations63
US7615329B2Nov 10, 2009
Branching self-assembling photoresist with decomposable backbone
INTEL CORP2 citations63
US7572732B2Aug 11, 2009
Method to modulate etch rate in SLAM
INTEL CORP2 citations63
US7138158B2Nov 21, 2006
Forming a dielectric layer using a hydrocarbon-containing precursor
INTEL CORP2 citations61
US7166413B2Jan 23, 2007
Enabling chain scission of branched photoresist
INTEL CORP2 citations60
US7560165B2Jul 14, 2009
Sealing porous dielectric materials
INTEL CORP2 citations59
US7241560B2Jul 10, 2007
Basic quencher/developer solutions for photoresists
INTEL CORP3 citations55
US8003293B2Aug 23, 2011
Pixelated photoresists
INTEL CORP0 citations51
US7723008B2May 25, 2010
Photoactive adhesion promoter in a slam
INTEL CORP1 citations51
US7718528B2May 18, 2010
Photoactive adhesion promoter in a SLAM
INTEL CORP0 citations51
US7452728B2Nov 18, 2008
Metal ion separation from aqueous solutions using photoswitchable ionophores
INTEL CORP0 citations51
US7405419B2Jul 29, 2008
Unidirectionally conductive materials for interconnection
INTEL CORP1 citations51
US7375030B2May 20, 2008
Method to assay sacrificial light absorbing materials and spin on glass materials for chemical origin of defectivity
INTEL CORP0 citations51
US7089785B2Aug 15, 2006
Method to assay sacrificial light absorbing materials and spin on glass materials for chemical origin of defectivity
INTEL CORP0 citations51
US7361455B2Apr 22, 2008
Anti-reflective coatings
INTEL CORP1 citations49
US7235344B2Jun 26, 2007
Energy harvesting molecules and photoresist technology
INTEL CORP0 citations49
US7615337B2Nov 10, 2009
Photoactive resist capping layer
INTEL CORP0 citations45