Inventor · disambiguated record
Kazuhiko Tonari
Also filed as: TONARI KAZUHIKO
5 granted patents·7 pending applications·11 citations·filing 2004–2025
72Inventor score
Top patents by PatentIndex Score
12 records- 0170US2024355635A1Etching apparatus and etching methodULVAC INC·Filed 2024·Application pending·0 cites
- 0269US7227159B2Ion implantation apparatus and ion implanting methodSONY CORP·Filed 2004·Granted Jun 5, 2007·7 cites·14 claims
- 0365US7642530B2Ion implantation apparatus and ion implanting methodTOSHIBA KK·Filed 2007·Granted Jan 5, 2010·1 cites·7 claims
- 0464US11319630B2Deposition apparatus and deposition methodULVAC INC·Filed 2017·Granted May 3, 2022·1 cites·2 claims
- 0561US8383496B2Plasma doping method and manufacturing method of semiconductor deviceTONARI KAZUHIKO·Filed 2009·Granted Feb 26, 2013·2 cites·10 claims
- 0659US2022208554A1Etching apparatus and etching methodULVAC INC·Filed 2021·Application pending·0 cites
- 0756US2024242938A1Etching device and etching methodULVAC INC·Filed 2024·Application pending·0 cites
- 0853US2025336681A1Etching method and etching deviceULVAC INC·Filed 2025·Application pending·0 cites
- 0952US2025054731A1Etching methodULVAC INC·Filed 2024·Application pending·0 cites
- 1044US8440551B2Plasma doping method and manufacturing method of semiconductor deviceTONARI KAZUHIKO·Filed 2012·Granted May 14, 2013·0 cites·4 claims
- 1142US2016300938A1Insulated Gate Bipolar Transistor and Production Method ThereofULVAC INC·Filed 2014·Application pending·0 cites
- 1238US2005244989A1Ion implantation apparatus and methodSHIBATA TAKESHI·Filed 2005·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →