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Inventor

EASTER WILLIAM GRAHAM

US19 patents
⚠️ This page may combine multiple inventors who share the name “EASTER WILLIAM GRAHAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LUCENT TECHNOLOGIES INC

12 patents
US6368955B1Apr 9, 2002

Method of polishing semiconductor structures using a two-step chemical mechanical planarization with slurry particles having different particle bulk densities

LUCENT TECHNOLOGIES INC57 citations95
US6234868B1May 22, 2001

Apparatus and method for conditioning a polishing pad

LUCENT TECHNOLOGIES INC41 citations92
US6150271ANov 21, 2000

Differential temperature control in chemical mechanical polishing processes

LUCENT TECHNOLOGIES INC34 citations91
US5967885AOct 19, 1999

Method of manufacturing an integrated circuit using chemical mechanical polishing

LUCENT TECHNOLOGIES INC20 citations91
US6290883B1Sep 18, 2001

Method for making porous CMP article

LUCENT TECHNOLOGIES INC43 citations89
US6214732B1Apr 10, 2001

Chemical mechanical polishing endpoint detection by monitoring component activity in effluent slurry

LUCENT TECHNOLOGIES INC15 citations84
US6369799B1Apr 9, 2002

Computer pointer device for handicapped persons

LUCENT TECHNOLOGIES INC16 citations83
US6183652B1Feb 6, 2001

Method for removing microorganism contamination from a polishing slurry

LUCENT TECHNOLOGIES INC10 citations73
US5892292AApr 6, 1999

Getterer for multi-layer wafers and method for making same

LUCENT TECHNOLOGIES INC16 citations73
US6287173B1Sep 11, 2001

Longer lifetime warm-up wafers for polishing systems

LUCENT TECHNOLOGIES INC5 citations62
US5951382ASep 14, 1999

Chemical mechanical polishing carrier fixture and system

LUCENT TECHNOLOGIES INC3 citations61
US6080671AJun 27, 2000

Process of chemical-mechanical polishing and manufacturing an integrated circuit

LUCENT TECHNOLOGIES INC4 citations57

AGERE SYST GUARDIAN CORP

4 patents

AGERE SYSTEMS INC

3 patents