Inventor
EASTER WILLIAM GRAHAM
US19 patents
⚠️ This page may combine multiple inventors who share the name “EASTER WILLIAM GRAHAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUCENT TECHNOLOGIES INC
12 patentsUS6368955B1Apr 9, 2002
Method of polishing semiconductor structures using a two-step chemical mechanical planarization with slurry particles having different particle bulk densities
LUCENT TECHNOLOGIES INC57 citations95
US6234868B1May 22, 2001
Apparatus and method for conditioning a polishing pad
LUCENT TECHNOLOGIES INC41 citations92
US6150271ANov 21, 2000
Differential temperature control in chemical mechanical polishing processes
LUCENT TECHNOLOGIES INC34 citations91
US5967885AOct 19, 1999
Method of manufacturing an integrated circuit using chemical mechanical polishing
LUCENT TECHNOLOGIES INC20 citations91
US6290883B1Sep 18, 2001
Method for making porous CMP article
LUCENT TECHNOLOGIES INC43 citations89
US6214732B1Apr 10, 2001
Chemical mechanical polishing endpoint detection by monitoring component activity in effluent slurry
LUCENT TECHNOLOGIES INC15 citations84
US6369799B1Apr 9, 2002
Computer pointer device for handicapped persons
LUCENT TECHNOLOGIES INC16 citations83
US6183652B1Feb 6, 2001
Method for removing microorganism contamination from a polishing slurry
LUCENT TECHNOLOGIES INC10 citations73
US5892292AApr 6, 1999
Getterer for multi-layer wafers and method for making same
LUCENT TECHNOLOGIES INC16 citations73
US6287173B1Sep 11, 2001
Longer lifetime warm-up wafers for polishing systems
LUCENT TECHNOLOGIES INC5 citations62
US5951382ASep 14, 1999
Chemical mechanical polishing carrier fixture and system
LUCENT TECHNOLOGIES INC3 citations61
US6080671AJun 27, 2000
Process of chemical-mechanical polishing and manufacturing an integrated circuit
LUCENT TECHNOLOGIES INC4 citations57
AGERE SYST GUARDIAN CORP
4 patentsUS6293847B1Sep 25, 2001
Apparatus for chemical mechanical polishing endpoint detection using a hydrogen sensor
AGERE SYST GUARDIAN CORP11 citations73
US6258231B1Jul 10, 2001
Chemical mechanical polishing endpoint apparatus using component activity in effluent slurry
AGERE SYST GUARDIAN CORP12 citations73
US6354910B1Mar 12, 2002
Apparatus and method for in-situ measurement of polishing pad thickness loss
AGERE SYST GUARDIAN CORP11 citations70
US6254454B1Jul 3, 2001
Reference thickness endpoint techniques for polishing operations
AGERE SYST GUARDIAN CORP6 citations62
AGERE SYSTEMS INC
3 patentsUS6518987B1Feb 11, 2003
Mouse and mouse template for a motion impaired user
AGERE SYSTEMS INC17 citations83
US6517416B1Feb 11, 2003
Chemical mechanical polisher including a pad conditioner and a method of manufacturing an integrated circuit using the chemical mechanical polisher
AGERE SYSTEMS INC12 citations73
US6728364B2Apr 27, 2004
Analog phone bank connector
AGERE SYSTEMS INC1 citations47