Inventor
MATSUSHITA TOMOHARU
JP7 patents
⚠️ This page may combine multiple inventors who share the name “MATSUSHITA TOMOHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS9888528B2Feb 6, 2018
Substrate support with multiple heating zones
APPLIED MATERIALS INC11 citations83
US11201078B2Dec 14, 2021
Substrate position calibration for substrate supports in substrate processing systems
APPLIED MATERIALS INC2 citations71
USD1071886SApr 22, 2025
Substrate support for a substrate processing chamber
APPLIED MATERIALS INC3 citations69
US12228395B2Feb 18, 2025
Substrate position calibration for substrate supports in substrate processing systems
APPLIED MATERIALS INC0 citations50
US10134615B2Nov 20, 2018
Substrate support with improved RF return
APPLIED MATERIALS INC0 citations50
US11031273B2Jun 8, 2021
Physical vapor deposition (PVD) electrostatic chuck with improved thermal coupling for temperature sensitive processes
APPLIED MATERIALS INC0 citations49