Inventor
HEO PIL KYUN
KR15 patents
⚠️ This page may combine multiple inventors who share the name “HEO PIL KYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
13 patentsUS11804371B2Oct 31, 2023
Substrate treatment apparatus and method of performing treatment process on substrate
SEMES CO LTD2 citations71
US12094733B2Sep 17, 2024
Substrate treatment apparatus
SEMES CO LTD0 citations60
US11495467B2Nov 8, 2022
Method and apparatus for etching thin layer
SEMES CO LTD1 citations59
US12337356B2Jun 24, 2025
Moving assembly for recovery guard and substrate processing apparatus
SEMES CO LTD0 citations58
US12300519B2May 13, 2025
Surface treatment method
SEMES CO LTD0 citations58
US11764084B2Sep 19, 2023
Surface treatment apparatus and surface treatment method
SEMES CO LTD0 citations58
US11940734B2Mar 26, 2024
Apparatus and method for treating substrate
SEMES CO LTD0 citations49
US12575358B2Mar 10, 2026
Flow resistance generating unit and substrate treating apparatus including the same
SEMES CO LTD0 citations48
US12463086B2Nov 4, 2025
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations48
US12429283B2Sep 30, 2025
Method and apparatus for treating a substrate
SEMES CO LTD0 citations48
US11682577B2Jun 20, 2023
Spin head, apparatus and method for treating a substrate including the spin head
SEMES CO LTD0 citations48
US11887883B2Jan 30, 2024
Heterogeneous composite material and method for producing the same
SEMES CO LTD0 citations47
US12046466B2Jul 23, 2024
Method and apparatus for treating substrate
SEMES CO LTD0 citations46