Moving assembly for recovery guard and substrate processing apparatus

Abstract

The moving assembly for a recovery guard includes a recovery vessel including a first recovery vessel disposed to surround a substrate support and a second recovery vessel disposed inside of the first recovery vessel, concentrically with respect to the first recovery vessel, and a lifting driver connected to the first and second recovery vessels and elevating the first and second recovery vessels. The lifting driver includes a motor, a drive shaft connected to the motor and rotated in a first direction, a first shaft connected to the first recovery vessel and extending in a second direction, perpendicular to the first direction, a second shaft connected to the second recovery vessel and extending in the second direction, a first clutch connecting the drive shaft and the first shaft, and a second clutch connecting the drive shaft and the second shaft.

What is claimed is: 
     
       1. A moving assembly for a recovery guard, comprising:
 a recovery vessel including a first recovery vessel disposed to surround a substrate support and a second recovery vessel disposed inside of the first recovery vessel, concentrically with respect to the first recovery vessel; and 
 a lifting driver connected to the first and second recovery vessels and elevating the first and second recovery vessels, 
 wherein the lifting driver includes a motor; a drive shaft connected to the motor and rotated in a first direction; a first shaft connected to the first recovery vessel and extending in a second direction, perpendicular to the first direction; a second shaft connected to the second recovery vessel and extending in the second direction; a first clutch connecting the drive shaft and the first shaft; and a second clutch connecting the drive shaft and the second shaft. 
 
     
     
       2. The moving assembly for a recovery guard of  claim 1 , wherein the first clutch is connected to a first pulley and transmitting or blocking rotation of the drive shaft to the first pulley,
 the second clutch is connected to a second pulley and transmitting or blocking the rotation of the drive shaft to the second pulley, 
 the first pulley is connected to a first belt, and the first belt is connected to a first shaft driving block connected to the first shaft, and 
 the second pulley is connected to a second belt, and the second belt is connected to a second shaft driving block connected to the second shaft. 
 
     
     
       3. The moving assembly for a recovery guard of  claim 2 , wherein the lifting driver further includes,
 a third pulley spaced apart from the first pulley in the second direction and connected to the first belt; and 
 a fourth pulley spaced apart from the second pulley in the second direction and connected to the first belt. 
 
     
     
       4. The moving assembly for a recovery guard of  claim 3 , wherein the lifting driver further includes a casing in which the first to fourth pulleys and the drive shaft are disposed,
 wherein the casing has a plurality of through-holes formed in the first direction and supports the drive shaft and rotation shafts of the first to fourth pulleys. 
 
     
     
       5. The moving assembly for a recovery guard of  claim 3 , wherein the lifting driver further includes,
 a first brake disposed on a rotation shaft of the third pulley and 
 a second brake disposed on a rotating shaft of the fourth pulley. 
 
     
     
       6. The moving assembly for a recovery guard of  claim 2 , wherein the first shaft driving block and the first shaft, and the second shaft driving block and the second shaft, are connected by a floating joint. 
     
     
       7. The moving assembly for a recovery guard of  claim 2 , wherein the lifting driver further includes,
 a first guide disposed adjacent to the first shaft driving block and extending in the second direction to guide the first shaft driving block to be moved in the second direction; and 
 a second guide disposed adjacent to the second shaft driving block and extending in the second direction to guide the second shaft driving block to be moved in the second direction. 
 
     
     
       8. The moving assembly for a recovery guard of  claim 5 , wherein the motor includes a rotation shaft extending in the first direction, and
 the drive shaft is connected to the rotation shaft of the motor by a third belt. 
 
     
     
       9. The moving assembly for a recovery guard of  claim 5 , wherein the lifting driver includes a first lifting driver disposed on one side of the first and second recovery vessels and a second lifting driver disposed in a position symmetrical to the first lifting driver with respect to a center of the first recovery vessel; and
 the motors of the first and second lifting drivers are provided with encoders such that the first and second lifting drivers are synchronously controlled. 
 
     
     
       10. The moving assembly for a recovery guard of  claim 1 , wherein the lifting driver includes a first connecting portion connecting the first shaft and the first recovery vessel, and a second connecting portion connecting the second shaft and the second recovery vessel,
 wherein the second connecting portion includes a through-hole through which the first shaft passes, 
 the first connecting portion and the second connecting portion are disposed concentrically in the second direction when viewed from the first direction, 
 the first shaft is connected to a position spaced apart from a center of the first connecting portion, and the second shaft is connected to a position spaced apart from a center of the second connecting portion. 
 
     
     
       11. The moving assembly for a recovery guard of  claim 3 , wherein the lifting driver further includes,
 a fifth pulley rotated by the first belt and located farther from the first pulley than the third pulley in the second direction; 
 a sixth pulley rotated by the second belt and located farther from the second pulley than the fourth pulley in the second direction; 
 a first brake disposed on a rotating shaft of the third pulley; and 
 a second brake disposed on a rotation shaft of the fourth pulley, 
 wherein the third pulley is disposed adjacent to the first pulley, a center of the third pulley being located away from a line connecting centers of the first pulley and the fifth pulley, and 
 the fourth pulley is disposed adjacent to the second pulley, a center of the fourth pulley being located at a position deviated from a line connecting centers of the second pulley and the sixth pulley. 
 
     
     
       12. A moving assembly for a recovery guard, comprising:
 a recovery vessel including a first recovery vessel disposed to surround a substrate support, and a second recovery vessel disposed inside of the first recovery vessel while having the same centerline as a centerline of the first recovery vessel; and 
 a lifting driver connected to the first and second recovery vessels and elevating the first and second recovery vessels, 
 wherein the lifting driver includes a motor, a drive shaft connected to the motor and rotated in a first direction, a first shaft connected to the first recovery vessel and extending in a second direction, perpendicular to the first direction, a second shaft connected to the second recovery vessel and extending in the second direction, a first clutch connected to the drive shaft and transmitting or blocking rotation of the drive shaft, a second clutch connected to the drive shaft and transmitting or blocking rotation of the drive shaft, a first pulley connected to the first clutch, a second pulley connected to the second clutch, a third pulley disposed in a position spaced apart from the first pulley in the second direction, connected to the first pulley by a first belt, and rotated together therewith, a fourth pulley disposed in a position spaced apart from the second pulley in the second direction, connected to the second pulley by a second belt, and rotated together therewith, a first brake disposed on a rotation shaft of the third pulley, and a second brake disposed on a rotation shaft of the fourth pulley, and 
 the lifting driver includes a first lifting driver disposed on one side of the first and second recovery vessels and a second lifting driver disposed in a position symmetrical to the first lifting driver with respect to the centerline. 
 
     
     
       13. The moving assembly for a recovery guard of  claim 12 , wherein the motors of the first and second lifting drivers are provided with encoders installed thereon such that the first and second lifting drivers are synchronously controlled. 
     
     
       14. The moving assembly for a recovery guard of  claim 13 , wherein the first and second brakes are electromagnetic brakes, the first and second clutches are electromagnetic clutches,
 the moving assembly for a recovery guard further comprising a controller connected to the first and second brakes, the first and second clutches, and the motor. 
 
     
     
       15. The moving assembly for a recovery guard of  claim 14 , wherein the first pulley is connected to a first belt, and the first belt is connected to a first shaft driving block connected to the first shaft, and
 the second pulley is connected to a second belt, and the second belt is connected to a second shaft driving block connected to the second shaft. 
 
     
     
       16. The moving assembly for a recovery guard of  claim 14 , wherein the first shaft driving block and the first shaft, and the second shaft driving block and the second shaft, are connected by a floating joint. 
     
     
       17. The moving assembly for a recovery guard of  claim 12 , wherein the lifting driver further includes,
 a fifth pulley rotated by the first belt and located farther from the first pulley than the third pulley in the second direction; and 
 a sixth pulley rotated by the second belt and located farther from the second pulley than the fourth pulley in the second direction, 
 the third pulley is disposed adjacent to the first pulley, a center of the third pulley being located away from a line connecting centers of the first and fifth pulleys, and 
 the fourth pulley is disposed adjacent to the second pulley, a center of the fourth pulley being located in a position deviated from a line connecting centers of the second pulley and the sixth pulley. 
 
     
     
       18. The moving assembly for a recovery guard of  claim 12 , wherein the first and second shafts are disposed at the same azimuthal angle from the centerline. 
     
     
       19. A substrate processing apparatus comprising:
 a substrate support rotating while supporting a substrate; 
 a treatment liquid supply unit supplying a treatment liquid to the substrate; and 
 a moving assembly for a recovery guard, including a recovery vessel recovering the treatment liquid scattered from the substrate, and a lifting driver connected to the recovery vessel and elevating the recovery vessel, 
 wherein the recovery vessel includes a first recovery vessel surrounding the substrate support, a second recovery vessel disposed inside of the first recovery vessel concentrically with respect to the first recovery vessel, a third recovery vessel disposed inside of the second recovery vessel concentrically with respect to the first recovery vessel, and a fourth recovery vessel disposed inside of the third recovery vessel concentrically with respect to the first recovery vessel, 
 the lifting driver includes a first lifting driver connected to the first and second recovery vessels, a second lifting driver disposed in a position symmetrical to the first lifting driver with respect to a centerline of the recovery vessel on a plane and connected to the first and second recovery vessels, a third lifting driver connected to the third and fourth recovery vessels, and a fourth lifting driver disposed in a position symmetrical to the third lifting driver with respect to a centerline of the recovery vessel and connected to the third and fourth recovery vessels, and 
 the first to fourth lifting drivers include a motor, a drive shaft connected to the motor and rotated in a first direction, a first shaft connected to the first recovery vessel and extending in a second direction, perpendicular to the first direction, a second shaft connected to the second recovery vessel and extending in the second direction, a first clutch connecting the drive shaft and the first shaft, and a second clutch connecting the drive shaft and the second shaft. 
 
     
     
       20. The substrate processing apparatus of  claim 19 , wherein the lifting driver further includes,
 a third pulley spaced apart from the first pulley in the second direction and connected to the first belt; 
 a fourth pulley disposed apart from the second pulley in the second direction and connected to the first belt; 
 a first brake disposed on a rotating shaft of the third pulley; and 
 a second brake disposed on a rotating shaft of the fourth pulley.