Inventor
SON WON SIK
KR7 patents
Patents
7 patentsUS12553138B2Feb 17, 2026
Apparatus and method of processing substrate
SEMES CO LTD0 citations59
US12337356B2Jun 24, 2025
Moving assembly for recovery guard and substrate processing apparatus
SEMES CO LTD0 citations58
US12517440B2Jan 6, 2026
Irradiating module, and substrate treating apparatus including the same
SEMES CO LTD0 citations49
US12463086B2Nov 4, 2025
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations48
US12431383B2Sep 30, 2025
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations48
US12508633B2Dec 30, 2025
Moving assembly for recovery guard and substrate processing apparatus
SEMES CO LTD0 citations46
US12400903B2Aug 26, 2025
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations45