Inventor
HWANG HO JONG
KR8 patents
Patents
8 patentsUS11804371B2Oct 31, 2023
Substrate treatment apparatus and method of performing treatment process on substrate
SEMES CO LTD2 citations71
US9748118B2Aug 29, 2017
Substrate treating apparatus
SEMES CO LTD5 citations69
US12237181B2Feb 25, 2025
Support unit and substrate treating apparatus
SEMES CO LTD0 citations61
US11961695B2Apr 16, 2024
Substrate treating apparatus, ion implantation apparatus, and ion implantation method
SEMES CO LTD0 citations60
US12544804B2Feb 10, 2026
Bowl for processing a substrate and processing substrate device including the same
SEMES CO LTD0 citations59
US12337356B2Jun 24, 2025
Moving assembly for recovery guard and substrate processing apparatus
SEMES CO LTD0 citations58
US11806767B2Nov 7, 2023
Substrate processing apparatus and substrate processing method
SEMES CO LTD0 citations58
US11887883B2Jan 30, 2024
Heterogeneous composite material and method for producing the same
SEMES CO LTD0 citations47