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Inventor
KANG GON-SU
KR
2 patents
Patents
2 patents
US9818596B2
Nov 14, 2017
Arc lamp and substrate heating apparatus having the arc lamp
SAMSUNG ELECTRONICS CO LTD
0 citations
43
US7531792B2
May 12, 2009
Analyzing chamber including a leakage ion beam detector and mass analyzer including the same
SAMSUNG ELECTRONICS CO LTD
0 citations
37