Inventor
SU JUNWEI
US14 patents
⚠️ This page may combine multiple inventors who share the name “SU JUNWEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
12 patentsUSD1067204SMar 18, 2025
Susceptor
ASM IP HOLDING BV6 citations84
USD1030687SJun 11, 2024
Susceptor
ASM IP HOLDING BV10 citations84
US11168395B2Nov 9, 2021
Temperature-controlled flange and reactor system including same
ASM IP HOLDING BV3 citations71
US10612136B2Apr 7, 2020
Temperature-controlled flange and reactor system including same
ASM IP HOLDING BV3 citations71
US11053591B2Jul 6, 2021
Multi-port gas injection system and reactor system including same
ASM IP HOLDING BV4 citations69
US12024775B2Jul 2, 2024
Gas distribution system and reactor system including same
ASM IP HOLDING BV2 citations67
US11718913B2Aug 8, 2023
Gas distribution system and reactor system including same
ASM IP HOLDING BV2 citations67
US12417933B2Sep 16, 2025
Wafer far edge temperature measurement system with lamp bank alignment
ASM IP HOLDING BV0 citations59
USD1028913SMay 28, 2024
Semiconductor deposition reactor ring
ASM IP HOLDING BV0 citations58
US12394659B2Aug 19, 2025
Susceptors with film deposition control features
ASM IP HOLDING BV0 citations48
US12234554B2Feb 25, 2025
Semiconductor deposition reactor and components for reduced quartz devitrification
ASM IP HOLDING BV0 citations47
US12563998B2Feb 24, 2026
Apparatus and methods for cooling reaction chambers in semiconductor processing systems
ASM IP HOLDING BV0 citations46