USD1028913SActiveUtility

Semiconductor deposition reactor ring

25
Assignee: ASM IP HOLDING BVPriority: Jun 30, 2021Filed: Jun 30, 2021Granted: May 28, 2024
Est. expiryJun 30, 2041(~14.9 yrs left)· nominal 20-yr term from priority
Inventors:Rutvij NaikJunwei SuWentao WangChuqin ZhouXing Lin
25
PatentIndex Score
0
Cited by
57
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a semiconductor deposition reactor ring, as shown and described.

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