Inventor
OHBA TAKAYUKI
JP26 patents
⚠️ This page may combine multiple inventors who share the name “OHBA TAKAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
11 patentsUS4902645AFeb 20, 1990
Method of selectively forming a silicon-containing metal layer
FUJITSU LTD61 citations96
US5393565AFeb 28, 1995
Method for deposition of a refractory metal nitride and method for formation of a conductive film containing a refractory metal nitride
FUJITSU LTD53 citations95
US4804560AFeb 14, 1989
Method of selectively depositing tungsten upon a semiconductor substrate
FUJITSU LTD125 citations94
US5232872AAug 3, 1993
Method for manufacturing semiconductor device
FUJITSU LTD42 citations92
US5066612ANov 19, 1991
Method of forming wiring of a semiconductor device
FUJITSU LTD36 citations89
US7166516B2Jan 23, 2007
Method for fabricating a semiconductor device including the use of a compound containing silicon and nitrogen to form an insulation film of SiN or SiCN
FUJITSU LTD13 citations83
US6998303B2Feb 14, 2006
Manufacture method for semiconductor device with patterned film of ZrO2 or the like
FUJITSU LTD12 citations81
US5264038ANov 23, 1993
Chemical vapor deposition system
FUJITSU LTD13 citations72
US6805138B2Oct 19, 2004
Semiconductor device production method and semiconductor device production apparatus
FUJITSU LTD11 citations69
US6664179B2Dec 16, 2003
Semiconductor device production method and semiconductor device production apparatus
FUJITSU LTD12 citations69
US7279790B2Oct 9, 2007
Semiconductor device and a manufacturing method thereof
FUJITSU LTD4 citations63
HONDA MOTOR CO LTD
5 patentsUS11437349B2Sep 6, 2022
Semiconductor device
HONDA MOTOR CO LTD0 citations62
US11404396B2Aug 2, 2022
Semiconductor device comprising memory semiconductor chip in which memory cell is laminated on semiconductor substrate
HONDA MOTOR CO LTD0 citations62
US11309290B2Apr 19, 2022
Semiconductor apparatus including penetration electrodes connecting laminated semiconductor chips
HONDA MOTOR CO LTD0 citations62
US11456028B2Sep 27, 2022
Semiconductor device and control method thereof
HONDA MOTOR CO LTD0 citations52
US11302379B2Apr 12, 2022
Semiconductor apparatus
HONDA MOTOR CO LTD0 citations52
TOKYO INST TECH
3 patentsUS12002781B2Jun 4, 2024
Semiconductor device and method for manufacturing same
TOKYO INST TECH0 citations52
US11756891B2Sep 12, 2023
Semiconductor device and method for manufacturing same
TOKYO INST TECH0 citations52
US12568833B2Mar 3, 2026
Semiconductor device having wiring part without being exposed from substrate
TOKYO INST TECH0 citations51